Integration of a microfluidic flow cell on a CMOS biosensor for DNA detection

被引：1

作者：

Caboni, Alessandra ^{[1
]}

Barbaro, Massimo ^{[1
]}

Homsy, Alexandra ^{[2
]}

van der Wal, Peter ^{[2
]}

Linder, Vincent ^{[2
]}

de Rooij, Nico

机构：

[1] Univ Cagliari, Dept Elect & Elect Engn, I-09123 Cagliari, Italy

[2] Univ Neuchatel, Inst Microtechnol, 2007 Neuchatel, Switzerland

来源：

PRIME: 2008 PHD RESEARCH IN MICROELECTRONICS AND ELECTRONICS, PROCEEDINGS | 2008年

关键词：

D O I：

10.1109/RME.2008.4595740

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper describes the fabrication technique for the realization a microfluidic flow cell to be integrated on a CMOS biosensor for DNA hybridization detection. The main element of the microfluidic system is made in polydimethylsiloxane (PDMS) elastomer and takes up an area of 5 mm(2). PDMS is cast against a silicon master patterned by Deep Reactive Ion Etching (DRIE) and then bonded on the chip by means of oxygen plasma activation. The micro channels patterned in the flow cell are connected with capillary tubes that can be easily interconnected to a common syringe.

引用

页码：121 / 124

页数：4

共 50 条

[21] A MICROFLUIDIC SENSOR FOR SINGLE CELL DETECTION IN A CONTINUOUS FLOW
Liu, Fan
Pawan, K. C.
Zhang, Ge
Zhe, Jiang
2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2017, : 194 - 197
[22] Microfluidic Sensor for Noncontact Detection of Cell Flow in a Microchannel
Demori, M.
Ferrari, V.
Farise, S.
Poesio, P.
Pedrazzani, R.
Steimberg, N.
Boniotti, J.
Mazzoleni, G.
26TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS, EUROSENSOR 2012, 2012, 47 : 1247 - 1250
[23] A CMOS CAPACITIVE BIOSENSOR ARRAY FOR HIGHLY SENSITIVE DETECTION OF PATHOGENIC AVIAN INFLUENZA DNA
Chen, Chien-Ming
Lu, Michael S. -C.
2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2017, : 1632 - 1635
[24] CMOS biosensor system for on-chip cell culture with read-out circuitry and microfluidic packaging
Welch, David
Christen, Jennifer Blain
2012 ANNUAL INTERNATIONAL CONFERENCE OF THE IEEE ENGINEERING IN MEDICINE AND BIOLOGY SOCIETY (EMBC), 2012, : 4990 - 4993
[25] Development of a microfluidic biosensor module for pathogen detection
Zaytseva, NV
Goral, VN
Montagna, RA
Baeumner, AJ
LAB ON A CHIP, 2005, 5 (08) : 805 - 811
[26] Magnetic Microfluidic Biosensor for the Detection & Quantification of Biomolecules
Kokkinis, Georgios
Phan, Manh-Huong
Srikanth, Hariharan
Cardoso, Susana
Giouroudi, Ioanna
2016 32ND SOUTHERN BIOMEDICAL ENGINEERING CONFERENCE (SBEC), 2016, : 171 - 172
[27] A Microfluidic Biosensor for Multiplexed Detection of Bacterial Pathogens
Lillehoj, Peter
Ho, Chih-Ming
Shi, Wenyuan
Kaplan, Chris
He, Jian
6TH IEEE INTERNATIONAL CONFERENCE ON NANO/MOLECULAR MEDICINE AND ENGINEERING (IEEE-NANOMED 2012), 2012,
[28] A Microfluidic Biosensor for Multiplexed Detection of Bacterial Pathogens
Lillehoj, Peter B.
Ho, Chih-Ming
Shi, Wenyuan
Kaplan, Chis
He, Jian
6TH IEEE INTERNATIONAL CONFERENCE ON NANO/MOLECULAR MEDICINE AND ENGINEERING (IEEE-NANOMED 2012), 2012, : 117 - 121
[29] Development of a microfluidic biosensor for detection of environmental mycobacteria
Jing, Gaoshan
Polaczyk, Amy
Oerther, Daniel B.
Papautsky, Ian
SENSORS AND ACTUATORS B-CHEMICAL, 2007, 123 (01) : 614 - 621
[30] MICROFLUIDIC BASED BIOSENSOR FOR DETECTION OF CARDIAC MARKERS
Gunda, Naga Siva Kumar
Mitra, Sushanta K.
PROCEEDINGS OF THE ASME FLUIDS ENGINEERING DIVISION SUMMER MEETING, 2013, VOL 2: FORA, 2014,

← 1 2 3 4 5 →