Integration of a microfluidic flow cell on a CMOS biosensor for DNA detection

被引：1
|
作者：
Caboni, Alessandra [1 ]
Barbaro, Massimo [1 ]
Homsy, Alexandra [2 ]
van der Wal, Peter [2 ]
Linder, Vincent [2 ]
de Rooij, Nico
机构：
[1] Univ Cagliari, Dept Elect & Elect Engn, I-09123 Cagliari, Italy
[2] Univ Neuchatel, Inst Microtechnol, 2007 Neuchatel, Switzerland
来源：
PRIME: 2008 PHD RESEARCH IN MICROELECTRONICS AND ELECTRONICS, PROCEEDINGS | 2008年
关键词：
D O I：
10.1109/RME.2008.4595740
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
This paper describes the fabrication technique for the realization a microfluidic flow cell to be integrated on a CMOS biosensor for DNA hybridization detection. The main element of the microfluidic system is made in polydimethylsiloxane (PDMS) elastomer and takes up an area of 5 mm(2). PDMS is cast against a silicon master patterned by Deep Reactive Ion Etching (DRIE) and then bonded on the chip by means of oxygen plasma activation. The micro channels patterned in the flow cell are connected with capillary tubes that can be easily interconnected to a common syringe.
引用
收藏
页码：121 / 124
页数：4
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