FET on hydrogenated diamond surface

被引:5
作者
Gulyaev, Yu. V. [1 ]
Mityagin, A. Yu.
Chucheva, G. V. [1 ]
Afanas'ev, M. S. [1 ]
Zyablyuk, K. N. [1 ]
Talipov, N. Kh. [1 ]
Nedosekin, P. G. [2 ]
Nabiev, A. E. [3 ]
机构
[1] Russian Acad Sci, Kotelnikov Inst Radio Engn & Elect, Fryazino Branch, Fryazino 141196, Moscow Oblast, Russia
[2] Ind Technol Ctr UralAlmazInvest, Moscow 121108, Russia
[3] Azerbaijan State Pedag Univ, Baku 370000, Azerbaijan
基金
俄罗斯基础研究基金会;
关键词
TERMINATED DIAMOND; DOPED DIAMOND; TRANSISTORS; CONTACT; GHZ;
D O I
10.1134/S1064226914030061
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
It is demonstrated that a FET can be created on a hydrogenated diamond surface. A technology for production and properties of conducting hydrogenated diamond surface are considered. The technology is used to create a FET on the hydrogenated (110) surface of the 2A natural diamond.
引用
收藏
页码:282 / 287
页数:6
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