Approach to measure thermal efficiency of bolometer sensors

被引：6

作者：

Mei, T

Neuzil, P

Karunasiri, G

Zeng, W

机构：

[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore

[2] Inst Microelect, MEMS Grp, Singapore 117685, Singapore

[3] USN, Postgrad Sch, Dept Phys, Monterey, CA 93943 USA

[4] Inst Microelect, FID Dept, Singapore 117685, Singapore

来源：

APPLIED PHYSICS LETTERS | 2002年 / 80卷 / 12期

关键词：

D O I：

10.1063/1.1462863

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Evaluation of thermal efficiency is of great importance for verifying the design optimization of microbolometer-based sensors. In this work, a measurement technique has been developed to determine the thermal efficiency of a microbolometer without using structural and material parameters. The microbolometer thermal efficiency is obtained by measuring the responsivity under infrared illumination and responsivity for unity thermal efficiency using the self-heating effect. The thermal efficiency of a metal-film microbolometer sensor was determined using this technique to demonstrate its viability. (C) 2002 American Institute of Physics.

引用

页码：2183 / 2185

页数：3

共 19 条

[1] Performance of cryogenic microbolometers and calorimeters with on-chip coolers [J].