Investigations of CH4, C2H2 and C2H4 dusty RF plasmas by means of FTIR absorption spectroscopy and mass spectrometry

被引：205
作者：
Deschenaux, C [1 ]
Affolter, A
Magni, D
Hollenstein, C
Fayet, P
机构：
[1] Ecole Polytech Fed Lausanne, Ctr Rech Phys Plasmas, CH-1015 Lausanne, Switzerland
[2] Tetra Pak Suisse SA, CH-1680 Romont, Switzerland
来源：
JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1999年 / 32卷 / 15期
关键词：
D O I：
10.1088/0022-3727/32/15/316
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Infrared (IR) absorption spectroscopy and mass spectrometry have been simultaneously applied to dusty radiofrequency (RF) plasmas in methane, acetylene and ethylene. The combination of IR absorption spectroscopy and mass spectrometry allows the chemical composition and structure of the most relevant plasma-produced neutral species, the ionic plasma composition and the chemical composition of the nanometer-sized particles to be precisely identified. The production of acetylenic compounds (C2Hx) seems to be a key mechanism for the powder formation in all the investigated hydrocarbon plasmas. Electron attachment to acetylenic compounds and the following ion-neutral reactions might lead to the high-mass carbon anions, which are trapped in the plasma and finally end in powder formation. The hydrogenation of the monomer strongly influences the composition of the ions. Finally the composition of the plasma-produced particles is mainly sp(3) bonded carbon and the infrared spectra show similarities to that of polyethylene.
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页码：1876 / 1886
页数：11
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