Hard X-ray photoelectron emission microscopy as tool for studying buried layers

被引：17

作者：

Wakita, T

Taniuchi, T

Ono, K

Suzuki, M

Kawamura, N

Takagaki, M

Miyagawa, H

Guo, FZ

Nakamura, T

Muro, T

Akinaga, H

Yokoya, T

Oshima, M

Kobayashi, K

机构：

[1] JASRI SPring 8, Sayo, Hyogo 6795198, Japan

[2] Univ Tokyo, Dept Appl Chem, Bunkyo Ku, Tokyo 1138586, Japan

[3] KEK, PF, IMSS, Tsukuba, Ibaraki 3050801, Japan

[4] AIST, NRI, Tsukuba, Ibaraki 3050801, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2006年 / 45卷 / 3A期

关键词：

photoelectron emission microscopy; synchrotron radiation; hard X-rays; buried layer; deep probing depth;

D O I：

10.1143/JJAP.45.1886

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have performed photoelectron emission microscopy measurements with hard X-rays (HX-PEEM) and have shown that HX-PEEM has a spatial resolution higher than 106 nm for observing the sample surface and can detect signals from a Au layer buried under a 50-nm-thick Co layer. These results mean that HX-PEEM has a probing depth one order of magnitude deeper than that of PEEM with soft X-rays. This deeper probing depth with HX-PEEM provides a new opportunity to investigate electronic and/or magnetic structures of buried layers under a thick overlayer. The notable advantages and potential applications of HX-PEEM are discussed.

引用

页码：1886 / 1888

页数：3

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