SIMS of thin films grown by pulsed laser deposition on isotopically labeled substrates

被引：8

作者：

Stender, Dieter ^{[1
]}

Cook, Stuart ^{[2
]}

Kilner, John A. ^{[2
]}

Doebeli, Max ^{[3
]}

Conder, Kazimierz ^{[4
]}

Lippert, Thomas ^{[1
]}

Wokaun, Alexander ^{[1
]}

机构：

[1] Paul Scherrer Inst, Mat Grp, Villigen, Switzerland

[2] Imperial Coll London, Dept Mat, London, England

[3] ETH, Lab Ion Beam Phys, Zurich, Switzerland

[4] Paul Scherrer Inst, Lab Dev & Methods, Villigen, Switzerland

来源：

SOLID STATE IONICS | 2013年 / 249卷

基金：

瑞士国家科学基金会;

关键词：

Thin film; Oxygen ion diffusion; Secondary ion mass spectrometry; Pulsed laser deposition; Strontium titanate; Yttria stabilized zirconia; DOPED STRONTIUM-TITANATE; ELECTRICAL-PROPERTIES; OXYGEN-TRANSPORT; CONDUCTIVITY; INTERFACES; DIFFUSION;

D O I：

10.1016/j.ssi.2013.07.014

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The oxygen diffusion kinetics in a strontium titanate (STO)-yttria stabilized zirconia (YSZ) heterostructure were investigated by secondary ion mass spectrometry (SIMS) depth profiling of pulsed laser deposited thin films grown on O-18 enriched single crystalline substrates. By annealing for 100 h at 1100 degrees C in an O-18(2) enriched atmosphere O-18 concentrations of similar to 81% and similar to 63% were reached in the YSZ, and STO substrates, respectively. The film depositions were performed at different substrate temperatures up to 750 degrees C and different oxygen background pressures in a range from 1.5 x 10(-5) mbar to 0.1 mbar to observe differences in the diffusion of the oxygen ions from the substrate into the films. Flat profiles of O-18 were obtained for the YSZ thin films implying a very fast diffusion that determines the isotope distribution during the deposition. For the STO films pronounced concentration profiles were obtained at 650 degrees C allowing estimations of the diffusion constant. Elemental mapping of the YSZ films revealed pinholes of micron size which are hardly detectable by other techniques. (C) 2013 Elsevier B.V. All rights reserved.

引用

页码：56 / 62

页数：7

共 24 条

[1]

Amante J.C, 1991, OXYGEN TRACER DIFFUS, P303

[2] Pulsed laser ablation and deposition of thin films [J].