Simulation and Experimental Analysis of Thermo-Mechanical Behavior of Microresonators under Dynamic Loading

被引：0

作者：

Pustan, Marius ^{[1
]}

Birleanu, Corina ^{[1
]}

Dudescu, Cristian ^{[1
]}

机构：

[1] Tech Univ Cluj Napoca, Cluj Napoca 400641, Romania

来源：

2012 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP) | 2012年

关键词：

POLYSILICON;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Simulation, finite element analysis and experimental investigations of the dynamical response of a microresonator under electrostatic actuation are presented in this paper. The scope is to characterize the influence of thermo-mechanical behavior of the material on the frequency response, amplitude and velocity of oscillations under continuous actuation. The effect of thermoelastic damping on vibrating structures is experimentally investigated by measuring the loss in amplitude and velocity of oscillations as a function of time and the changes in quality factor. The tests are performed in ambient conditions and in vacuum in order to separate the extrinsic damping of beam by the intrinsic effect given by thermoelastic damping. The vibrating structure under investigations is a polysilicon clamped-clamped beam.

引用

页码：87 / 92

页数：6

共 13 条

[1] RETRACTED: Dynamic analysis of geometrically nonlinear and electrostatically actuated micro-beams (Retracted Article) [J].