Powder synthesis and electrical, dielectric spectroscopic characterization of rare earth disilicates (D-Er2Si2O7): Transistor scaling-22 nm or beyond

被引:3
|
作者
Ameer, Shahid [1 ]
Maqsood, Asghari [1 ]
机构
[1] NUST, TTL, SCME, Islamabad, Pakistan
关键词
Rare earth ceramic dielectrics; Solid state synthesis; XRD and SEM; AC; DC and Dielectric spectroscopy; NON-CRYSTALLINE SYSTEMS; AC CONDUCTIVITY; AMORPHOUS-SEMICONDUCTORS; THIN-FILMS; CHALCOGENIDE; SILICATES; OXIDE;
D O I
10.1016/j.ssc.2012.07.015
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Rare earth disilicates are now a day's being analyzed as a dielectric layer for transistor scaling for the advanced 22 nm regime or beyond. So to explore these materials, the polymorphic powdered Er2Si2O7 (D phase) is synthesized by solid state double sintering method to study its characteristics. Structural characterization has been performed by X-ray diffraction. SEM and EDX results shows the rods like morphology of particles and composition. The dc electrical properties are evaluated by two probe method as a function of temperature. The dielectric spectroscopic measurements of D-Er2Si2O7 are performed in the temperature range 300-420 K and frequency range 1 kHz to 1 MHz. The dc electrical transport phenomenon is analyzed using Mott's variable-range hopping approach. The ac conductivity sigma(ac)(omega) is obtained through the dielectric spectroscopic measurements. (C) 2012 Elsevier Ltd. All rights reserved.
引用
收藏
页码:1811 / 1816
页数:6
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