An Equivalent Circuit Model for Semiparallel Plate Electrostatic Torsion Mirror

被引：1
作者：
Maruyama, Satoshi [1 ]
Mita, Makoto [2 ]
Isamoto, Keiji [3 ]
Chong, Changho [3 ]
Fujita, Hiroyuki [4 ]
Toshiyoshi, Hiroshi [1 ]
机构：
[1] Univ Tokyo, Adv Sci & Technol Res Ctr, Tokyo 1138654, Japan
[2] JAXA, Inst Space & Astronaut Sci, Tokyo, Japan
[3] Santec Corp, Komaki, Aichi, Japan
[4] Univ Tokyo, Inst Ind Sci, Tokyo, Japan
来源：
ELECTRONICS AND COMMUNICATIONS IN JAPAN | 2014年 / 97卷 / 01期
关键词：
electrostatic actuation; torsion mirror; semiparallel plates; equivalent circuit; variable optical attenuator; MICROMIRRORS;
D O I：
10.1002/ecj.11486
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
An equivalent circuit model for a semiparallel plate electrostatic torsion mirror has been developed based on an electrical circuit simulator. An analytical model for the electrostatic torque has been translated into a nonlinear dependent current source as a function of the input voltages that interpret the drive voltages and the mirror angle. Use of the suspension width as a fitting parameter explained well the experimental results on frequency response and the mirror's static deflection. (c) 2013 Wiley Periodicals, Inc. Electron Comm Jpn, 97(1): 37-47, 2014; Published online in Wiley Online Library (wileyonlinelibrary.com). DOI 10.1002/ecj.11486
引用
收藏
页码：37 / 47
页数：11
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