Visible-Light Emission Properties of Erbium-Doped Tantalum-Oxide Films Produced by Co-Sputtering

被引：3

作者：

Singh, Mayank Kumar ^{[1
]}

Miura, Kenta ^{[1
]}

Fusegi, Genjoh ^{[1
]}

Kano, Kazusa ^{[1
]}

Hanaizumi, Osamu ^{[1
]}

机构：

[1] Gunma Univ, Grad Sch Engn, 1-5-1 Tenjin Cho, Kiryu, Gunma 3768515, Japan

来源：

ADVANCED MICRO-DEVICE ENGINEERING III | 2013年 / 534卷

关键词：

erbium; tantalum oxide; sputtering; annealing; PHOTONIC CRYSTALS; FLUORESCENCE;

D O I：

10.4028/www.scientific.net/KEM.534.154

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The visible-light emission properties of erbium(Er)-doped tantalum-oxide films prepared by co-sputtering were evaluated. Photoluminescence (PL) peaks at wavelengths of 550 and 670 nm could be observed from these films by ultraviolet-laser excitation after annealing. The dependence of Er3+ concentration, annealing temperature, and annealing time on the PL peak intensities were investigated. Such light-emitting sputtered films can be useful as high-index materials of photonic crystals that can be applied to novel active devices.

引用

页码：154 / +

页数：2

共 13 条

[1] Structural analysis of RF sputtered Er doped Ta2O5 films [J].

Bange, Jaspal Parganram ;

Singh, Mayank Kumar ;

Kano, Kazusa ;

Miura, Kenta ;

Hanaizumi, Osamu .

SILICON SCIENCE AND ADVANCED MICRO-DEVICE ENGINEERING I, 2011, 459 :32-+

[2] Characterization of tantalum oxide films grown by pulsed laser deposition [J].

Boughaba, S ;

Islam, MU ;

Sproule, GI ;

Graham, MJ .

SURFACE & COATINGS TECHNOLOGY, 1999, 120 :757-764

[3] Effects of continuous-wave (670-nm) red light on wound healing [J].

Erdle, Brandon J. ;

Brouxhon, Sabine ;

Kaplan, Martin ;

VanBuskirk, JoAnne ;

Pentland, Alice P. .

DERMATOLOGIC SURGERY, 2008, 34 (03) :320-325

[4] Fabrication of photonic crystals in tantalum pentoxide films [J].

Huebner, U ;

Boucher, R ;

Morgenroth, W ;

Kunert, J ;

Roth, H ;

Meyer, HG ;

Glaser, T ;

Schroeter, S .

MICROELECTRONIC ENGINEERING, 2005, 78-79 :422-428

[5] GREEN UP-CONVERSION FLUORESCENCE IN ER3+-DOPED TA2O5 HEATED GEL [J].

KOJIMA, K ;

YOSHIDA, S ;

SHIRAISHI, H ;

MAEGAWA, A .

APPLIED PHYSICS LETTERS, 1995, 67 (23) :3423-3425

[6] Structural and optical properties of erbium-doped Ba0.7Sr0.3TiO3 thin films [J].

Kuo, SY ;

Hsieh, WF .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2005, 23 (04) :768-772

[7] Hafnium-doped tantalum oxide high-k dielectrics with sub-2 nm equivalent oxide thickness -: art. no. 232906 [J].

Lu, J ;

Kuo, Y .

APPLIED PHYSICS LETTERS, 2005, 87 (23) :1-3

[8] Reduction of propagation and bending losses of heterostructured photonic crystal waveguides by use of a high-Δ structure [J].

Miura, K ;

Ohtera, Y .

OPTICS LETTERS, 2003, 28 (09) :734-736

[9] Observation of Blue-Light Emission from Tantalum Oxide Films Deposited by Radio-Frequency Magnetron Sputtering [J].

Miura, Kenta ;

Miyazaki, Hiroki ;

Hanaizumi, Osamu .

IEICE TRANSACTIONS ON ELECTRONICS, 2008, E91C (10) :1669-1672

[10] Fluorescence of Ta2O5 thin films doped by kilo-electron-volt Er implantation: Application to microcavities [J].

Rigneault, H ;

Flory, F ;

Monneret, S ;

Robert, S ;

Roux, L .

APPLIED OPTICS, 1996, 35 (25) :5005-5012

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