Thickness dependence of scattering cross-sections in quantitative scanning transmission electron microscopy

被引:12
作者
Martinez, G. T. [1 ]
van den Bos, K. H. W. [1 ]
Alania, M. [1 ]
Nellist, P. D. [2 ]
Van Aert, S. [1 ]
机构
[1] Univ Antwerp, Electron Microscopy Mat Sci EMAT, Gronenborgerlaan 171, B-2020 Antwerp, Belgium
[2] Univ Oxford, Dept Mat, Parks Rd, Oxford OX1 3PH, England
关键词
ADF STEM; Electron scattering; Quantitative STEM; Image simulation; LATTICE-RESOLUTION CONTRAST; OPTIMAL EXPERIMENTAL-DESIGN; THERMAL DIFFUSE-SCATTERING; STEM; ATOMS; PROBE; SIMULATION; CATALYST; DETECTOR; IMAGES;
D O I
10.1016/j.ultramic.2018.01.005
中图分类号
TH742 [显微镜];
学科分类号
摘要
In quantitative scanning transmission electron microscopy (STEM), scattering cross-sections have been shown to be very sensitive to the number of atoms in a column and its composition. They correspond to the integrated intensity over the atomic column and they outperform other measures. As compared to atomic column peak intensities, which saturate at a given thickness, scattering cross-sections increase monotonically. A study of the electron wave propagation is presented to explain the sensitivity of the scattering cross-sections. Based on the multislice algorithm, we analyse the wave propagation inside the crystal and its link to the scattered signal for the different probe positions contained in the scattering cross-section for detector collection in the low-, middle- and high-angle regimes. The influence to the signal from scattering of neighbouring columns is also discussed. (C) 2018 Elsevier B.V. All rights reserved.
引用
收藏
页码:84 / 92
页数:9
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