Effects of high energy Au-ion irradiation on the microstructure of diamond films

被引:46
作者
Chen, Shih-Show [1 ,2 ]
Chen, Huang-Chin [1 ,3 ]
Wang, Wei-Cheng [1 ]
Lee, Chi-Young [3 ]
Lin, I-Nan [1 ]
Guo, Jinghua [4 ]
Chang, Ching-Lin [1 ]
机构
[1] Tamkang Univ, Dept Phys, Tamsui 251, New Taipei, Taiwan
[2] Taipei Coll Maritime Technol, Dept Informat Technol & Mobile Commun, Tamsui 251, New Taipei, Taiwan
[3] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan
[4] Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Adv Light Source, Berkeley, CA 94720 USA
关键词
X-RAY-ABSORPTION; DOPED ULTRANANOCRYSTALLINE DIAMOND; FIELD-EMISSION CHARACTERISTICS; RADIATION DETECTION DEVICES; CVD DIAMOND; POLYCRYSTALLINE DIAMOND; NANOCRYSTALLINE DIAMOND; CARBON-FILMS; THIN-FILMS; BONDING STRUCTURE;
D O I
10.1063/1.4795507
中图分类号
O59 [应用物理学];
学科分类号
摘要
The effects of 2.245 GeV Au-ion irradiation and subsequent annealing processes on the evolution of microstructure of diamond films with microcrystalline (MCD) or ultra-nanocrystalline (UNCD) granular structure were investigated, using near edge x-ray absorption fine structure and electron energy loss spectroscopy in transmission electron microscopy. For MCD films, the Au-ion irradiation disintegrated some of the diamond grains, resulting in the formation of nano-sized carbon clusters embedded in a matrix of amorphous carbon (a-C). The annealing process recrystallized the diamond grains and converted the a-C into nano-sized graphite particulates and, at the same time, induced the formation of nano-sized i-carbon clusters, the bcc structured carbon with a(0) = 0.432 nm. In contrast, for UNCD films, the Au-ion irradiation transformed the grain boundary phase into nano-sized graphite, but insignificantly altered the crystallinity of the grains of the UNCD films. The annealing process recrystallized the materials. In some of the regions, the residual a-C phases were transformed into nano-sized graphites, whereas in other regions i-carbon nanoclusters were formed. The difference in irradiation-induced microstructural transformation behavior between the MCD and the UNCD films is ascribed to the different granular structures of the two types of films. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4795507]
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页数:10
相关论文
共 49 条
  • [41] Surface chemistry and bonding configuration of ultrananocrystalline diamond surfaces and their effects on nanotribological properties
    Sumant, A. V.
    Grierson, D. S.
    Gerbi, J. E.
    Carlisle, J. A.
    Auciello, O.
    Carpick, R. W.
    [J]. PHYSICAL REVIEW B, 2007, 76 (23)
  • [42] UV Raman characteristics of nanocrystalline diamond films with different grain size
    Sun, Z
    Shi, JR
    Tay, BK
    Lau, SP
    [J]. DIAMOND AND RELATED MATERIALS, 2000, 9 (12) : 1979 - 1983
  • [43] Sze S. M., 1979, PHYS SEMICONDUCTOR D
  • [44] A comparison study of hydrogen incorporation among nanocrystalline, microcrystalline and polycrystalline diamond films grown by chemical vapor deposition
    Tang, C. J.
    Neto, M. A.
    Soares, M. J.
    Fernandes, A. J. S.
    Neves, A. J.
    Gracio, J.
    [J]. THIN SOLID FILMS, 2007, 515 (7-8) : 3539 - 3546
  • [45] Wang SG, 2002, PHYS STATUS SOLIDI A, V193, P546, DOI 10.1002/1521-396X(200210)193:3<546::AID-PSSA546>3.0.CO
  • [46] 2-9
  • [47] Microstructure and its effect on field electron emission of grain-size-controlled nanocrystalline diamond films
    Wu, KH
    Wang, EG
    Cao, ZX
    Wang, ZL
    Jiang, X
    [J]. JOURNAL OF APPLIED PHYSICS, 2000, 88 (05) : 2967 - 2974
  • [48] ELECTRON FIELD-EMISSION FROM ION-IMPLANTED DIAMOND
    ZHU, W
    KOCHANSKI, G
    JIN, S
    SEIBLES, L
    JACOBSON, DC
    MCCORMACK, M
    WHITE, AE
    [J]. APPLIED PHYSICS LETTERS, 1995, 67 (08) : 1157 - 1159
  • [49] Ziegler J.F., 1985, STOPPING RANGE IONS, V1