Effects of high energy Au-ion irradiation on the microstructure of diamond films

被引:46
作者
Chen, Shih-Show [1 ,2 ]
Chen, Huang-Chin [1 ,3 ]
Wang, Wei-Cheng [1 ]
Lee, Chi-Young [3 ]
Lin, I-Nan [1 ]
Guo, Jinghua [4 ]
Chang, Ching-Lin [1 ]
机构
[1] Tamkang Univ, Dept Phys, Tamsui 251, New Taipei, Taiwan
[2] Taipei Coll Maritime Technol, Dept Informat Technol & Mobile Commun, Tamsui 251, New Taipei, Taiwan
[3] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan
[4] Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Adv Light Source, Berkeley, CA 94720 USA
关键词
X-RAY-ABSORPTION; DOPED ULTRANANOCRYSTALLINE DIAMOND; FIELD-EMISSION CHARACTERISTICS; RADIATION DETECTION DEVICES; CVD DIAMOND; POLYCRYSTALLINE DIAMOND; NANOCRYSTALLINE DIAMOND; CARBON-FILMS; THIN-FILMS; BONDING STRUCTURE;
D O I
10.1063/1.4795507
中图分类号
O59 [应用物理学];
学科分类号
摘要
The effects of 2.245 GeV Au-ion irradiation and subsequent annealing processes on the evolution of microstructure of diamond films with microcrystalline (MCD) or ultra-nanocrystalline (UNCD) granular structure were investigated, using near edge x-ray absorption fine structure and electron energy loss spectroscopy in transmission electron microscopy. For MCD films, the Au-ion irradiation disintegrated some of the diamond grains, resulting in the formation of nano-sized carbon clusters embedded in a matrix of amorphous carbon (a-C). The annealing process recrystallized the diamond grains and converted the a-C into nano-sized graphite particulates and, at the same time, induced the formation of nano-sized i-carbon clusters, the bcc structured carbon with a(0) = 0.432 nm. In contrast, for UNCD films, the Au-ion irradiation transformed the grain boundary phase into nano-sized graphite, but insignificantly altered the crystallinity of the grains of the UNCD films. The annealing process recrystallized the materials. In some of the regions, the residual a-C phases were transformed into nano-sized graphites, whereas in other regions i-carbon nanoclusters were formed. The difference in irradiation-induced microstructural transformation behavior between the MCD and the UNCD films is ascribed to the different granular structures of the two types of films. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4795507]
引用
收藏
页数:10
相关论文
共 49 条
  • [1] Radiation detection devices made from CVD diamond
    Bergonzo, P
    Tromson, D
    Mer, C
    [J]. SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2003, 18 (03) : S105 - S112
  • [2] CVD diamond for radiation detection devices
    Bergonzo, P
    Brambilla, A
    Tromson, D
    Mer, C
    Guizard, B
    Foulon, F
    Amosov, V
    [J]. DIAMOND AND RELATED MATERIALS, 2001, 10 (3-7) : 631 - 638
  • [3] Bonding structure in nitrogen doped ultrananocrystalline diamond
    Birrell, J
    Gerbi, JE
    Auciello, O
    Gibson, JM
    Gruen, DM
    Carlisle, JA
    [J]. JOURNAL OF APPLIED PHYSICS, 2003, 93 (09) : 5606 - 5612
  • [4] Morphology and electronic structure in nitrogen-doped ultrananocrystalline diamond
    Birrell, J
    Carlisle, JA
    Auciello, O
    Gruen, DM
    Gibson, JM
    [J]. APPLIED PHYSICS LETTERS, 2002, 81 (12) : 2235 - 2237
  • [5] Chen H. C., 2013, COMMUNICATION
  • [6] STRUCTURAL STUDIES OF ARGON-SPUTTERED AMORPHOUS-CARBON FILMS BY MEANS OF EXTENDED X-RAY-ABSORPTION FINE-STRUCTURE
    COMELLI, G
    STOHR, J
    ROBINSON, CJ
    JARK, W
    [J]. PHYSICAL REVIEW B, 1988, 38 (11): : 7511 - 7519
  • [7] The effect of nitrogen addition to Ar/CH4 plasmas on the growth, morphology and field emission of ultrananocrystalline diamond
    Corrigan, TD
    Gruen, DM
    Krauss, AR
    Zapol, P
    Chang, RPH
    [J]. DIAMOND AND RELATED MATERIALS, 2002, 11 (01) : 43 - 48
  • [8] Radiation hardness of polycrystalline diamond thin films irradiated with 100 MeV I7+ ions
    Dilawar, N
    Kapil, R
    Vankar, VD
    Avasthi, DK
    Kabiraj, D
    Mehta, GK
    [J]. THIN SOLID FILMS, 1997, 305 (1-2) : 88 - 94
  • [9] HYDROGEN IN POLYCRYSTALLINE DIAMOND - AN INFRARED-ANALYSIS
    DISCHLER, B
    WILD, C
    MULLERSEBERT, W
    KOIDL, P
    [J]. PHYSICA B-CONDENSED MATTER, 1993, 185 (1-4) : 217 - 221
  • [10] Transformation of graphite into nanodiamond following extreme electronic excitations
    Dunlop, A.
    Jaskierowicz, G.
    Ossi, P. M.
    Della-Negra, S.
    [J]. PHYSICAL REVIEW B, 2007, 76 (15)