Lower friction and higher wear resistance of fluorine-incorporated amorphous carbon films

被引：7

作者：

Cui, Jinfeng ^{[1
]}

Qiang, Li ^{[2
]}

Zhang, Bin ^{[2
]}

Yang, Tao ^{[1
,2
]}

Zhang, Junyan ^{[2
]}

机构：

[1] Lanzhou Univ Technol, Sch Petrochem Engn, Lanzhou 730050, Peoples R China

[2] Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China

来源：

SURFACE AND INTERFACE ANALYSIS | 2013年 / 45卷 / 09期

基金：

中国国家自然科学基金;

关键词：

amorphous hydrogenated carbon films; fluorine doping; fluorine modification; tribological properties; DIAMOND-LIKE CARBON; CHEMICAL-VAPOR-DEPOSITION; SILICON; FABRICATION; COATINGS; PECVD;

D O I：

10.1002/sia.5283

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Plasma-enhanced chemical vapor deposition was employed to fabricate hydrogenated amorphous carbon (a-C:H) films and fluorine-doped hydrogenated amorphous (a-C:H:F) carbon films. For comparison purpose, the a-C:H films were treated with CF4 plasma. (3), C-F and C-F-2 groups in both the a-C:H:F film and the surface CF4 plasma processed hydrogenated amorphous carbon (F-P-a-C:H) films. Moreover, the a-C:H:F films, because of the transformation of sp(3) to sp(2), possess a lower friction coefficient than that of the F-P-a-C:H films. Copyright (c) 2013 John Wiley & Sons, Ltd.

引用

页码：1329 / 1333

页数：5

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