A Survey of Run-to-Run Control Algorithms for High-mix Semiconductor Manufacturing Processes

被引：0

作者：

Ma Ming-Da ^{[1
]}

Zeng Xian-Lin ^{[1
]}

Duan Guang-Ren ^{[1
]}

机构：

[1] Harbin Inst Technol, Ctr Control & Guidance Technol, Harbin 150001, Peoples R China

来源：

2011 30TH CHINESE CONTROL CONFERENCE (CCC) | 2011年

关键词：

Run-to-run control; Semiconductor Manufacturing; High-mix process; Control Threads; State Estimation; STATE ESTIMATION; EWMA CONTROLLER; PRODUCT; STABILITY;

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

The modeling and control of high-mix production system in semiconductor manufacturing impose great challenge for process engineers. Many different methods have been proposed to improve control performance of the high-mix system. In this paper, an overview of the recent control algorithms for high-mix system is presented. The thread-based methods and the non-threaded state estimation methods which are studied and practiced widely in semiconductor manufacturing are discussed in detail. Further research directions for the run-to-run control of mixed product system are pointed out based on the extensive study of current literatures.

引用

页码：5474 / 5479

页数：6

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