A Survey of Run-to-Run Control Algorithms for High-mix Semiconductor Manufacturing Processes

被引：0
作者：
Ma Ming-Da [1 ]
Zeng Xian-Lin [1 ]
Duan Guang-Ren [1 ]
机构：
[1] Harbin Inst Technol, Ctr Control & Guidance Technol, Harbin 150001, Peoples R China
来源：
2011 30TH CHINESE CONTROL CONFERENCE (CCC) | 2011年
关键词：
Run-to-run control; Semiconductor Manufacturing; High-mix process; Control Threads; State Estimation; STATE ESTIMATION; EWMA CONTROLLER; PRODUCT; STABILITY;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
The modeling and control of high-mix production system in semiconductor manufacturing impose great challenge for process engineers. Many different methods have been proposed to improve control performance of the high-mix system. In this paper, an overview of the recent control algorithms for high-mix system is presented. The thread-based methods and the non-threaded state estimation methods which are studied and practiced widely in semiconductor manufacturing are discussed in detail. Further research directions for the run-to-run control of mixed product system are pointed out based on the extensive study of current literatures.
引用
收藏
页码：5474 / 5479
页数：6
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