Optical properties of electron beam evaporated Ge2Sb2Te5 thin films for rewritable high density data storage applications

被引:0
作者
Ramanathaswamy, P [1 ]
Jayakumar, S [1 ]
Kannan, M [1 ]
机构
[1] PSG Coll Technol, Thin Film Ctr, Dept Phys, Coimbatore, Tamil Nadu, India
关键词
phase change; Ge2Sb2Te5; films; amorphous; polycrystalline; contrast; microstructure;
D O I
10.1080/00150190500315822
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Ge2Sb2Te5 thin films were deposited by electron beam evaporation onto glass substrates at 303 K and 453 K substrate temperatures. The effect of film microstructure (modified by substrate temperature) on optical properties over the visible region was analyzed. It is observed that Ge2Sb2Te5 thin films show good optical contrast in the lower wavelength region. Microstructural and spectral dependence on optical constants (n & k) of the films were studied. The optical band gap and the nature of transition of the Ge2Sb2Te5 thin films also have been reported. Amorphous to crystalline microstructural phase change due to substrate temperature in these films was confirmed by X-ray diffraction and SEM analysis.
引用
收藏
页码:1023 / 1028
页数:6
相关论文
共 14 条
  • [1] Optical properties and crystallization characteristics of Ge-doped Sb70Te30 phase change recording film
    Her, YC
    Hsu, YS
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2003, 42 (2B): : 804 - 808
  • [2] Improved high-density phase-change recording
    Jacobs, BAJ
    Duchateau, JPWB
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (1B): : 491 - 494
  • [3] Study of oxygen-doped GeSbTe film and its effect as an interface layer on the recording properties in the blue wavelength
    Jeong, TH
    Seo, H
    Lee, KL
    Choi, SM
    Kim, SJ
    Kim, SY
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2001, 40 (3B): : 1609 - 1612
  • [4] JEONG TH, 1999, J APPL PHYS, V89, P2
  • [5] Mechanical properties of phase-change recording media: GeSbTe films
    Jong, CA
    Fang, WL
    Lee, CM
    Chin, TS
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2001, 40 (5A): : 3320 - 3325
  • [6] KIM JH, 1998, JPN J APPL PHYS, V37, P1
  • [7] Novel bonding technology for hermetically sealed silicon micropackage
    Lee, DJ
    Ju, BK
    Choi, WB
    Jeong, JW
    Lee, YH
    Jang, J
    Lee, KB
    Oh, MH
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (1A): : 1 - 6
  • [8] LEE TY, 2001, J APPL PHYS, V89, P6
  • [9] MARTIJN HR, 2003, JPN J APPL PHYS, V42, P1
  • [10] Microstructural changes of phase change GeSb2Te4 thin film in short-wavelength optical storage
    Men, LQ
    Gan, FX
    [J]. OPTICS COMMUNICATIONS, 1998, 145 (1-6) : 21 - 26