Fabrication and NO2 Sensing Characteristics of an In2O3 Nanowire Gas Sensor

被引：12

作者：

Moon, S. E. ^{[1
]}

Kim, E. -K. ^{[1
]}

Lee, H. -Y. ^{[1
]}

Lee, J. -W. ^{[1
]}

Park, J. ^{[1
]}

Park, S. -J. ^{[1
]}

Kwak, J. -H. ^{[1
]}

Park, K. -H. ^{[1
]}

Kim, J. ^{[1
]}

Jo, G. -H. ^{[2
]}

Lee, T. -H. ^{[2
]}

机构：

[1] Elect & Telecommun Res Inst, Taejon 305350, South Korea

[2] Gwangju Inst Sci & Technol, Dept Mat Sci Engn, Kwangju 500712, South Korea

来源：

JOURNAL OF THE KOREAN PHYSICAL SOCIETY | 2009年 / 54卷 / 02期

关键词：

In2O3; Nanowire device; NO2; Chemical sensor;

D O I：

10.3938/jkps.54.830

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

High-quality single-crystalline In2O3 nanowires were synthesized using a gold catalytic vapor-liquid-solid (VLS) process. Single and multi In2O3 nanowire devices were fabricated by using electron beam lithography and photolithography and their current-voltage characteristics were measured after a post process to acquire reproducible devices for possible applications as a chemical gas sensor. The temperature-dependent current-voltage characteristics were measured to investigate the temperature-dependant electrical transport properties for possible applications as a chemical gas sensor. To test the possibility for use as chemical sensor, we measured the NO2 gas response.

引用

页码：830 / 834

页数：5