Electronic color charts for dielectric films on silicon

被引：100

作者：

Henrie, J ^{[1
]}

Kellis, S ^{[1
]}

Schultz, SM ^{[1
]}

Hawkins, A ^{[1
]}

机构：

[1] Brigham Young Univ, Dept Elect & Comp Engn, Provo, UT 84602 USA

来源：

OPTICS EXPRESS | 2004年 / 12卷 / 07期

关键词：

D O I：

10.1364/OPEX.12.001464

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This paper presents the calculation of the perceived color of dielectric films on silicon. A procedure is shown for computing the perceived color for an arbitrary light source, light incident angle, and film thickness. The calculated color is converted into RGB parameters that can be displayed on a color monitor, resulting in the generation of electronic color charts for dielectric films. This paper shows generated electronic color charts for both silicon dioxide and silicon nitride films on silicon. (C) 2004 Optical Society of America.

引用

页码：1464 / 1469

页数：6