Wireless strain sensor based on the magnetic strain anisotropy dependent ferromagnetic resonance

被引:6
作者
Chen, Yicheng [1 ,2 ]
Hu, Chaojie [1 ,2 ]
Wang, Zhiguang [1 ]
Li, Yaojin [1 ,2 ]
Zhu, Shukai [1 ,2 ]
Su, Wei [1 ,2 ]
Hu, Zhongqiang [1 ,2 ]
Zhou, Ziyao [1 ,2 ]
Liu, Ming [1 ]
机构
[1] Xi An Jiao Tong Univ, Elect Mat Res Lab, Key Lab, Minist Educ, Xian 710049, Peoples R China
[2] Xi An Jiao Tong Univ, Int Ctr Dielect Res, Fac Elect & Informat Engn, Xian 710049, Peoples R China
基金
中国国家自然科学基金;
关键词
Application prospect - Ferromagnetic resonance (FMR) - Ferromagnetic thin films - Human Activity Monitoring - Industrial automation - Intelligent robotic systems - Piezoelectric substrates - Strain anisotropies;
D O I
10.1063/5.0022900
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Wireless strain sensors have received extensive attention owing to their wide application prospects in structural health monitoring, industrial automation, human activity monitoring, and intelligent robotic systems. Here, a wireless strain sensor prototype based on the magnetoelectric heterostructure of ferromagnetic thin films on a piezoelectric substrate has been developed. The ferromagnetic resonance (FMR) frequency of the sensor is strongly dependent on external strain due to the large magnetostriction of the film. The piezoelectric substrate with a programmable voltage has been used as a strain source for the characterization of the wireless strain sensor. The limit of detection of the wireless strain sensor is 0.54 mu epsilon, which is comparable with that of commercial metal-foil sensors that need connection wires. More importantly, the FMR strain sensor shows a sensitivity of 65.46 ppm/mu epsilon, indicating more than a 60 fold improvement than that of traditional wireless strain sensors based on patch antenna and RLC resonators whose frequency shift is mainly due to the strain induced dimension change.
引用
收藏
页数:6
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共 21 条
  • [1] [Anonymous], 2020, CHIN J CRIT CARE INT, V6, P1
  • [2] Reusable Passive Wireless RFID Sensor for Strain Measurement on Metals
    Chakaravarthi, Geetha
    Logakannan, Krishna Prasath
    Philip, Jeby
    Rengaswamy, Jayaganthan
    Ramachandran, Velmurugan
    Arunachalam, Kavitha
    [J]. IEEE SENSORS JOURNAL, 2018, 18 (12) : 5143 - 5150
  • [3] Passive Wireless Frequency Doubling Antenna Sensor for Strain and Crack Sensing
    Cho, Chunhee
    Yi, Xiaohua
    Li, Dan
    Wang, Yang
    Tentzeris, Manos M.
    [J]. IEEE SENSORS JOURNAL, 2016, 16 (14) : 5725 - 5733
  • [4] Embeddable wireless strain sensor based on resonant rf cavities
    Chuang, J
    Thomson, DJ
    Bridges, GE
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2005, 76 (09)
  • [5] Wireless strain measurement using circular microstrip patch antennas
    Daliri, Ali
    Galehdar, Amir
    John, Sabu
    Wang, Chun H.
    Rowe, Wayne S. T.
    Ghorbani, Kamran
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 2012, 184 : 86 - 92
  • [6] Characterization of magnetomechanical properties in FeGaB thin films
    Dong, Cunzheng
    Li, Menghui
    Liang, Xianfeng
    Chen, Huaihao
    Zhou, Haomiao
    Wang, Xinjun
    Gao, Yuan
    McConney, Michael E.
    Jones, John G.
    Brown, Gail J.
    Howe, Brandon M.
    Sun, Nian X.
    [J]. APPLIED PHYSICS LETTERS, 2018, 113 (26)
  • [7] Fractal serpentine-shaped design for stretchable wireless strain sensors
    Dong, Wentao
    Cheng, Xiao
    Wang, Xiaoming
    Zhang, Hailiang
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2018, 124 (07):
  • [8] Highly Sensitive Surface Acoustic Wave Strain Sensor for the Measurement of Tire Deformation
    Eun, Kyoungtae
    Lee, Ki Jung
    Lee, Ki Keun
    Yang, Sang Sik
    Choa, Sung-Hoon
    [J]. INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 2016, 17 (06) : 699 - 707
  • [9] A Batteryless, Wireless Strain Sensor Using Resonant Frequency Modulation
    Lee, Kyeong Jae
    Chou, Namsun
    Kim, Sohee
    [J]. SENSORS, 2018, 18 (11)
  • [10] Highly Sensitive Surface Acoustic Wave Flexible Strain Sensor
    Li, Qing
    Liu, Jie
    Yang, Bin
    Lu, Lijun
    Yi, Zhiran
    Tian, Yingwei
    Liu, Jingquan
    [J]. IEEE ELECTRON DEVICE LETTERS, 2019, 40 (06) : 961 - 964