High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP)

被引：120

作者：

Obata, Kotaro ^{[1
]}

El-Tamer, Ayman ^{[1
]}

Koch, Lothar ^{[1
]}

Hinze, Ulf ^{[1
]}

Chichkov, Boris N. ^{[1
]}

机构：

[1] Laser Zentrum Hannover eV, D-30419 Hannover, Germany

来源：

LIGHT-SCIENCE & APPLICATIONS | 2013年 / 2卷

关键词：

femtosecond laser; large-scale structuring; laser material processing; photochemistry; two-photon polymerization; WAVE-GUIDES; FEMTOSECOND; LASER; FABRICATION; MICROFABRICATION; RESOLUTION; ABLATION; STORAGE;

D O I：

10.1038/lsa.2013.72

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We developed a novel two-photon polymerization (2PP) configuration for fabrication of high-aspect three-dimensional (3D) structures, with an overall height larger than working distance of the microscope objective used for laser beam focusing into a photosensitive material. This method is based on a modified optical 2PP setup, where a microscope objective (1003 high N.A.), immersion oil and cover glass can be moved together into the photosensitive material, resulting in an effective higher and wider objective working range (WOW-2PP). The proposed technique enables the fabrication of high-aspect structures with sub-micrometer process resolution. 3D structures with a height of 7 mm are demonstrated, which could hardly be built with the conventional 2PP set-up due to refractive index mismatch and laser beam disturbances.

引用

页码：e116 / e116

页数：4

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