High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP)

被引:120
作者
Obata, Kotaro [1 ]
El-Tamer, Ayman [1 ]
Koch, Lothar [1 ]
Hinze, Ulf [1 ]
Chichkov, Boris N. [1 ]
机构
[1] Laser Zentrum Hannover eV, D-30419 Hannover, Germany
来源
LIGHT-SCIENCE & APPLICATIONS | 2013年 / 2卷
关键词
femtosecond laser; large-scale structuring; laser material processing; photochemistry; two-photon polymerization; WAVE-GUIDES; FEMTOSECOND; LASER; FABRICATION; MICROFABRICATION; RESOLUTION; ABLATION; STORAGE;
D O I
10.1038/lsa.2013.72
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We developed a novel two-photon polymerization (2PP) configuration for fabrication of high-aspect three-dimensional (3D) structures, with an overall height larger than working distance of the microscope objective used for laser beam focusing into a photosensitive material. This method is based on a modified optical 2PP setup, where a microscope objective (1003 high N.A.), immersion oil and cover glass can be moved together into the photosensitive material, resulting in an effective higher and wider objective working range (WOW-2PP). The proposed technique enables the fabrication of high-aspect structures with sub-micrometer process resolution. 3D structures with a height of 7 mm are demonstrated, which could hardly be built with the conventional 2PP set-up due to refractive index mismatch and laser beam disturbances.
引用
收藏
页码:e116 / e116
页数:4
相关论文
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