Microfabricated electrodynamic transformers for electromechanical power conversion

This paper presents a compact power electronic device, called an 'electrodynamic transformer (ET)', that transfers electrical power between isolated circuits through electrodynamically coupled vibrations of a mechanical beam structure. Background motivating factors are discussed, and an equivalent circuit model of the ET is presented. A microscale (10 mm(3)) ET is designed, fabricated and characterized, achieving similar to 40% maximum efficiency. Taking advantage of the unique circuit topology of the ET equivalent circuit model, a dc/ac power inverter is then implemented with only two external components, a MOSFET and a capacitor.