An absolute displacement measurement method of simple graphic decimal shift encoding

被引:1
作者
Shi Hailin [1 ,2 ]
Fu Min [1 ,2 ]
Zhu Ge [1 ,2 ]
Chen Fan [1 ,2 ]
Li Changli [1 ,2 ]
Yu Xiaoyu [1 ,2 ]
机构
[1] Chongqing Univ Technol, Coll Mech Engn, Chongqing 400054, Peoples R China
[2] Chongqing Univ Technol, Chongqing Key Lab Time Grating Sensing & Adv Test, Minist Educ, Engn Res Ctr Mech Testing Technol & Equipment, Chongqing 400054, Peoples R China
来源
2019 INTERNATIONAL CONFERENCE ON OPTICAL INSTRUMENTS AND TECHNOLOGY: OPTOELECTRONIC MEASUREMENT TECHNOLOGY AND SYSTEMS | 2020年 / 11439卷
基金
中国国家自然科学基金;
关键词
absolute measurement; decimal shift encoding; precision code; time-grating;
D O I
10.1117/12.2543441
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Aiming at the problem that the coding difficulty of the traditional absolute encoder increases with the increase of the resolution, a novel method of simple graphic decimal shift encoding is proposed. This method uses the coarse code plus precision code to realize high accuracy measurement. The coarse code is obtained by encoding the simple graphic, which is captured by the image sensor. The encoding sequence is received according to the light intensity, and then uses a simple mathematical formula to complete the decoding. And the precision code is defined by time-grating measurement. The optical signal of the sinusoidal light transmitting surface is firstly received by the photocell and then transformed by the circuit to the voltage signal. The precision code is finally obtained by comparing reference signal with the electrical traveling wave signal, which is transformed from the voltage signal. According to the proposed principle, a prototype with a grating pitch of 0.6mm and a range of 530mm was set up. Experimental result shows that the absolute measurement accuracy of +/- 0.30 mu m is realized. It also proved that the resolution can be improved to 1nm in the experiment.
引用
收藏
页数:8
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