Double Corner Cube Method for Enhancing the Sensitivity of Straightness Measurement

被引：0
|
作者：
Pan, Tung-Shiuan [1 ]
Lee, Ju-Yi [1 ]
Wu, Szu-Wei [1 ]
Hsieh, Hung-Lin [2 ]
Hsu, Cheng-Chih [3 ]
机构：
[1] Natl Cent Univ, Dept Mech Engn, Chungli, Taiwan
[2] Natl Taiwan Univ Sci & Technol, Dept Mech Engn, Taipei, Taiwan
[3] Yuan Ze Univ, Dept Photon Engn, Chungli 32003, Taiwan
来源：
2012 PROCEEDINGS OF SICE ANNUAL CONFERENCE (SICE) | 2012年
关键词：
straightness; corner cube; quadrant detector; SYSTEM; MICROSCOPY; FIBER;
D O I：
暂无
中图分类号：
TP301 [理论、方法];
学科分类号：
081202 ;
摘要：
A method of straightness measurement utilizing two corner cubes is proposed. The architectural design of the system leads to the magnification of the displacement of a light spot on the detector with the same offset of the determinand. This method enhances the sensitivity of the system and raises the precision to about 5 mu m.
引用
收藏
页码：1010 / 1013
页数：4
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