Microfabrication of Piezoelectric Composite Ultrasound Transducers (PC-MUT)

被引：0
|
作者：
Jiang, X. [1 ]
Yuan, J. R. [2 ]
Cheng, A. [3 ]
Snook, K. [1 ]
Cao, P. J. [2 ]
Rehrig, P. W. [1 ]
Hackenberger, W. S. [1 ]
Lavalelle, G. [3 ]
Geng, X. [4 ]
Shrout, T. R. [3 ]
机构：
[1] TRS Technol Inc, State Coll, PA 16801 USA
[2] Boston Sci, Fremont, CA 94538 USA
[3] Penn State Univ, University Pk, PA 16803 USA
[4] Blatek Inc, State Coll, PA 16801 USA
来源：
2006 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-5, PROCEEDINGS | 2006年
关键词：
piezoelectric composite; PC-MUT; PMN-PT single crystal; ultrasound; transducer; micromachining;
D O I：
暂无
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
In this paper a piezoelectric composite based micromachined ultrasound transducer (PC-MUT) fabrication technology is presented. PMN-PT single crystal posts with side length of 14 mu m and height of > 60 mu m were fabricated using a deep dry etching method. High frequency (20-50 MHz) PMN-PT single crystal/epoxy 1-3 composites were prepared and the electromechanical coupling coefficient of the composites was similar to 0.72. Prototype 40 MHz ultrasound transducers showed promising sensitivity and bandwidth.
引用
收藏
页码：922 / +
页数：2
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