Optical properties of acrylate-based negative-type photoresist and its application to optical waveguide fabrication

被引:6
作者
Gustafik, P
Sugihara, O
Okamoto, N
机构
[1] Shizuoka Univ, Grad Sch Elect Sci & Technol, Hamamatsu 4328561, Japan
[2] Tohoku Univ, Inst Multidisciplinary Res Adv Mat, Aoba Ku, Sendai, Miyagi 9808577, Japan
[3] Shizuoka Univ, Fac Engn, Shizuoka 4328561, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2004年 / 43卷 / 4B期
关键词
optical waveguides; cold UV stamping; optical properties;
D O I
10.1143/JJAP.43.2011
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this article, we present some of the optical properties of a polymeric acrylate-based photoresist material called PNME, by its principal components, which are pentaerythritol triacrylate, n-methyldiethanolamine, and eosin. The refractive index and absorption spectra were measured. Because of the low absorption of PNME in the datacom and telecom regions, PNME was studied with respect to its suitability for the fabrication of a channel waveguide and/or an optical fiber. A multimode optical waveguide was fabricated using a cold UV stamping fabrication method, and propagation losses at 1.3 mum were measured. An optical fiber core was fabricated using a light-induced self-writing fabrication method. In our study, it was found that optical waveguides made from PNME have low propagation losses due to smooth sidewalls and the low absorption of PNME. An optical waveguide with a corrugated core was also fabricated.
引用
收藏
页码:2011 / 2014
页数:4
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