Chemical Vapor Deposition-Derived Graphene with Electrical Performance of Exfoliated Graphene

被引:346
作者
Petrone, Nicholas [1 ]
Dean, Cory R. [1 ,2 ]
Meric, Inanc [2 ]
van der Zande, Arend M. [1 ]
Huang, Pinshane Y. [3 ]
Wang, Lei [1 ]
Muller, David [3 ,4 ]
Shepard, Kenneth L. [2 ]
Hone, James [1 ]
机构
[1] Columbia Univ, Dept Mech Engn, New York, NY 10027 USA
[2] Columbia Univ, Dept Elect Engn, New York, NY 10027 USA
[3] Cornell Univ, Sch Appl & Engn Phys, Ithaca, NY 14853 USA
[4] Cornell Univ, Kavli Inst, Ithaca, NY 14853 USA
基金
美国国家科学基金会;
关键词
Graphene; CVD; boron nitride; grain; mobility; HIGH-QUALITY; FILMS;
D O I
10.1021/nl204481s
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
While chemical vapor deposition (CVD) promises a scalable method to produce large-area graphene, CVD-grown graphene has heretofore exhibited inferior electronic properties in comparison with exfoliated samples. Here we test the electrical transport properties of CVD-grown graphene in which two important sources of disorder, namely grain boundaries and processing-induced contamination, are substantially reduced. We grow CVD graphene with grain sizes up to 250 mu m to abate grain boundaries, and we transfer graphene utilizing a novel, dry-transfer method to minimize chemical contamination. We fabricate devices on both silicon dioxide and hexagonal boron nitride (h-BN) dielectrics to probe the effects of substrate-induced disorder. On both substrate types, the large-grain CVD graphene samples are comparable in quality to the best reported exfoliated samples, as determined by low-temperature electrical transport and magnetotransport measurements. Small-grain samples exhibit much greater variation in quality and inferior performance by multiple measures, even in samples exhibiting high field-effect mobility. These results confirm the possibility of achieving high-performance graphene devices based on a scalable synthesis process.
引用
收藏
页码:2751 / 2756
页数:6
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