Ion energy distribution of plasma ions of a hollow cathode discharge in Ar + N2 and Ar + O2 gas mixtures

被引：0
|
作者：
Hippler, Rainer [1 ,2 ]
Cada, Martin [1 ]
Hubicka, Zdenek [1 ]
机构：
[1] Czech Acad Sci, Inst Phys, Na Slovance 2, Prague 18221, Czech Republic
[2] Univ Greifswald, Inst Phys, Felix Hausdorff Str 6, D-17489 Greifswald, Germany
来源：
EUROPEAN PHYSICAL JOURNAL D | 2022年 / 76卷 / 11期
关键词：
ELECTRON-IMPACT IONIZATION; CROSS-SECTIONS; THIN-FILMS; DEPOSITION; ATOMS; RF; SILICON; GLOW;
D O I：
10.1140/epjd/s10053-022-00539-8
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A hollow cathode discharge with a Ti cathode and a positively biased ring anode was operated in Ar + N-2 or Ar + O-2 gas mixtures. The energy distribution of plasma ions is investigated with the help of energy-resolved mass spectrometry. Singly and doubly charged Ar+ and Ar2+ ions and molecular N-2(+) or O(2)(+ )ions are the most abundant ionic species. The kinetic energy of all plasma ions is enhanced by a positive anode voltage.
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页数：7
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