Spatial and phase-resolved optical emission patterns in capacitively coupled radio-frequency plasmas

被引：10

作者：

Nemschokmichal, Sebastian ^{[1
]}

Dittmann, Kristian ^{[1
]}

Meichsner, Juergen ^{[1
]}

机构：

[1] Ernst Moritz Arndt Univ Greifswald, Inst Phys, D-17487 Greifswald, Germany

来源：

IEEE TRANSACTIONS ON PLASMA SCIENCE | 2008年 / 36卷 / 04期

关键词：

argon; gas discharges; hydrogen; optical spectroscopy; oxygen; plasma measurements; plasma sheaths;

D O I：

10.1109/TPS.2008.917171

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

Phase-resolved optical emission spectroscopy, is a powerful tool to investigate the excitation mechanisms within the radio-frequency (RF) cycle of capacitively, coupled RF plasmas. In this paper, the optical emission of oxygen, hydrogen, and argon atoms is investigated over a wide range of process parameters. The spatially, (axial) and temporally, resolved spectroscopy, reveals four prominent emission patterns.

引用

页码：1360 / 1361

页数：2

共 3 条

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