Manufacturing and Characterization of a Thermoelectric Energy Harvester Using the CMOS-MEMS Technology

被引:31
|
作者
Peng, Shih-Wen [1 ]
Shih, Po-Jen [2 ]
Dai, Ching-Liang [1 ]
机构
[1] Natl Chung Hsing Univ, Dept Mech Engn, Taichung 402, Taiwan
[2] Natl Univ Kaohsiung, Dept Civil & Environm Engn, Kaohsiung 811, Taiwan
关键词
MEMS; energy harvester; thermoelectric; CMOS; READOUT CIRCUIT; FABRICATION; SENSOR; GENERATORS;
D O I
10.3390/mi6101439
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
The fabrication and characterization of a thermoelectric energy harvester using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technology were presented. The thermoelectric energy harvester is composed of eight circular energy harvesting cells, and each cell consists of 25 thermocouples in series. The thermocouples are made of p-type and n-type polysilicons. The output power of the energy harvester relies on the number of the thermocouples. In order to enhance the output power, the energy harvester increases the thermocouple number per area. The energy harvester requires a post-CMOS process to etch the sacrificial silicon dioxide layer and the silicon substrate to release the suspended structures of hot part. The experimental results show that the energy harvester has an output voltage per area of 0.178 mV.mm(-2).K-1 and a power factor of 1.47 x 10(-3) pW.mm(-2).K-2.
引用
收藏
页码:1560 / 1568
页数:9
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