The effect of growth temperature on the coaxial InxGa1 - xN/GaN nanowires grown by metalorganic chemical vapor deposition

被引:1
作者
Park, Ji-Hyeon [1 ]
Navamathavan, R. [1 ]
Ra, Yong-Ho [1 ]
Yeom, Bo-Ra [1 ]
Sim, Jae-Kwan [1 ]
Ahn, Haeng-Kwun [1 ]
Lee, Cheul-Ro [1 ]
机构
[1] Chonbuk Natl Univ, Sch Adv Mat Engn, Res Ctr Adv Mat Dev RCAMD, Semicond Mat & Proc Lab, Jeonju 561756, South Korea
基金
新加坡国家研究基金会;
关键词
Nanostructures; MOCVD; Gallium compounds; Semiconducting III-V materials; Nanowires; MOLECULAR-BEAM EPITAXY; NANOROD ARRAYS; GAN; HETEROSTRUCTURES; FACETS;
D O I
10.1016/j.tsf.2012.06.009
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We report on the growth of coaxial InxGa1 (-) N-x/GaN nanowires (NWs) on Si(111) substrates by using pulsed flow metalorganic chemical vapor deposition. The coaxial InxGa1 (-) N-x/GaN NWs were grown by a two step process in which the core (GaN) structure was grown at a higher temperature followed by the shell (InxGa1 (-) N-x) structure at a lower temperature. Dense and well-oriented coaxial InxGa1 (-) N-x/GaN NWs were grown with an average diameter and length of about 300 +/- 50 nm and 1.5-2.0 mu m, respectively. The coaxial InxGa1 (-) N-x/GaN NW was confirmed by cathodoluminescence mapping and high-resolution transmission electron microscopy. It is proposed that the critical dissociation of precursors at an elevated growth temperature can lead to a clear formation of an outer-shell in coaxial InxGa1 (-) N-x/GaN NWs. (C) 2012 Elsevier B. V. All rights reserved.
引用
收藏
页码:6975 / 6979
页数:5
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