New Vaporization Sources for H2O2 for Pre-Treatment/Cleaning of ALD Deposition Surfaces

被引：0
|
作者：
Alvarez, Dan [1 ]
Heinlein, Ed [1 ]
Holmes, Russell J. [1 ]
Arya, Bhuvnesh [1 ]
Shon-Roy, Lita [1 ]
Spiegelman, Jeff [1 ]
机构：
[1] RASIRC, San Diego, CA USA
来源：
2013 24TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE (ASMC) | 2013年
关键词：
Hydrogen Peroxide Delivery; ALD; Germanium; Surface Preparation; Surface Cleaning;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
High mobility channel materials and new device structures will be needed to meet the power and performance specifications in future technology nodes. In these new material systems and devices various electrically active defects are present at or close to the interface between the high-k dielectric and the alternative channel material causing a major concern for both the performance and the reliability of these new devices. Novel "dry" cleaning and surface preparation methods are now being sought, where the term "dry" refers to gas phase or vapor chemistries. Our approach entails the development of hydrogen peroxide (H2O2) vapor phase chemistries, where H2O2/water mixtures are delivered and removed in gas phase.
引用
收藏
页码：159 / 162
页数：4
相关论文
共 50 条
  • [1] Pre-treatment with H2O2 induces salt tolerance in Barley seedlings
    Fedina, I. S.
    Nedeva, D.
    Cicek, N.
    BIOLOGIA PLANTARUM, 2009, 53 (02) : 321 - 324
  • [2] Pre-treatment of industrial wastewaters using bone charcoal/UV/H2O2
    Daifullah, AAM
    El-Reefy, SA
    Gad, HMH
    FRESENIUS ENVIRONMENTAL BULLETIN, 1998, 7 (12A): : 903 - 911
  • [3] THE EFFECT OF H2O2 PRE-TREATMENT ON ANTIOXIDANT ENZYME ACTIVITIES OF TRITICALE UNDER SALT STRESS
    Demirbas, Sefer
    Balkan, Alpay
    COMPTES RENDUS DE L ACADEMIE BULGARE DES SCIENCES, 2020, 73 (08): : 1169 - 1178
  • [4] Severity of Chilling Injury of Sweet Potato Shoots Is Affected by Pre-Treatment of H2O2 and NaCl
    Lin, W. C.
    Block, G. S.
    VI INTERNATIONAL POSTHARVEST SYMPOSIUM, 2010, 877 : 543 - 548
  • [5] Characteristics of ALD-ZnO Thin Film Transistor Using H2O and H2O2 as Oxygen Sources
    Yang, Jun
    Bahrami, Amin
    Ding, Xingwei
    Lehmann, Sebastian
    Kruse, Nadine
    He, Shiyang
    Wang, Bowen
    Hantusch, Martin
    Nielsch, Kornelius
    ADVANCED MATERIALS INTERFACES, 2022, 9 (15)
  • [6] Pre-Treatment Combined H2SO4/H2O2/NaOH to Obtain the Lignocellulosic Fractions of Sugarcane Bagasse
    de Assumpcao, S. M. N.
    Pontes, L. A. M.
    de Carvalho, L. S.
    Campos, L. M. A.
    de Andrade, J. C. F.
    da Silva, E. G.
    REVISTA VIRTUAL DE QUIMICA, 2016, 8 (03) : 803 - 822
  • [7] Effects of mild thermal pre-treatment combined with H2O2 addition on waste activated sludge digestibility
    Gonzalez, Adrian
    van Lier, Jules B.
    de Kreuk, Merle K.
    WASTE MANAGEMENT, 2022, 141 : 163 - 172
  • [8] Influencing mechanism of H2O2 & Fe2+ pre-treatment on natural organic matter fouling behavior of membranes
    Miao, Rui
    Tian, Man-Lin
    Yang, Yi-Fan
    Mi, Yue
    Wang, Lei
    Huang, Dan-Xi
    Zhongguo Huanjing Kexue/China Environmental Science, 2024, 44 (12): : 6691 - 6697
  • [9] H2O2 cleaning stabilized reference wafers
    不详
    SOLID STATE TECHNOLOGY, 1998, 41 (06) : 46 - 46
  • [10] Improvement in anaerobic degradation of olive mill effluent (OME) by pre-treatment using H2O2, UV-H2O2 and Fenton's process
    Azbar, Nuri
    Keskin, Tugba
    Catalkaya, Ebru
    INTERNATIONAL JOURNAL OF GREEN ENERGY, 2008, 5 (03) : 189 - 198
12345