Thermal MEMS for inertial systems

被引：0

作者：

Zinoviev, D. ^{[1
]}

Andreev, V. ^{[1
]}

Loktev, D. ^{[1
]}

Tuzovsky, K. ^{[1
]}

机构：

[1] Moscow State Inst Elect Engn, Moscow, Russia

来源：

THERMES 2007: THERMAL CHALLENGES IN NEXT GENERATION ELECTRONIC SYSTEMS | 2007年

关键词：

heat transfer; MEMS; gyro; tilt;

D O I：

暂无

中图分类号：

O414.1 [热力学];

学科分类号：

摘要：

The vibration gyroscope with thermal excitation of primary vibrations is designed. Such design allows to generate vibrations of amplitude up to several hundreds of microns, which is optimal for piezoresistive detection. The electronic circuit of generation and maintenance of vibrations and thermal method of resonance frequency fine-tuning and signal pick-up were developed. To compensate gyroscope sensitivity to tilt angle the sensitive thermal tiltmeter was developed.

引用

页码：129 / +

页数：2