Ruthenium/aerogel nanocomposites via atomic layer deposition

被引：60
|
作者：
Biener, Juergen [1 ]
Baumann, Theodore F.
Wang, Yinmin
Nelson, Erik J.
Kucheyev, Sergei O.
Hamza, Alex V.
Kemell, Marianna
Ritala, Mikko
Leskela, Markku
机构：
[1] Lawrence Livermore Natl Lab, Nanoscale Synth & Characterizat Lab, Livermore, CA 94550 USA
[2] Univ Helsinki, Dept Chem, FIN-00014 Helsinki, Finland
来源：
NANOTECHNOLOGY | 2007年 / 18卷 / 05期
关键词：
D O I：
10.1088/0957-4484/18/5/055303
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
We present a general approach to prepare metal/aerogel nanocomposites via template directed atomic layer deposition ( ALD). In particular, we used a Ru ALD process consisting of alternating exposures to bis( cyclopentadienyl) ruthenium ( RuCp2) and air at 350 degrees C to deposit metallic Ru nanoparticles on the internal surfaces of carbon and silica aerogels. The technique does not affect the morphology of the aerogel template and offers excellent control over metal loading by simply adjusting the number of ALD cycles. We also discuss the limitations of our ALD approach and suggest ways to overcome these.
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页数：4
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