Multi-gas detection using Fabry-Perot interferometers on silicon chip

被引：11

作者：

Guertin, Regis ^{[1
]}

Bianki, Marc-Antoine ^{[1
]}

Lemieux-Leduc, Cedric ^{[1
]}

Peter, Yves-Alain ^{[1
]}

机构：

[1] Polytech Montreal, Dept Engn Phys, Montreal, PQ, Canada

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2021年 / 335卷

关键词：

Gas sensing; Fabry-Perot; Polymer; Non-specific detection; DESIGN; ARRAY;

D O I：

10.1016/j.snb.2021.129655

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

This work presents an all optical on chip integrated gas sensor array for sensing multiple gas simultaneously using non-specific polymers as the sensing material. The individual sensors are vertically etched into silicon. They are made of two Bragg mirrors forming a Fabry-Perot cavity which is functionalized with different polymers such as polyethylene glycol (PEG), SU-8 and polydimethylsiloxane (PDMS). Multi-gas detection was achieved for various gas mixtures of isopropyl alcohol (IPA), H2O, valeric acid and butanol. Using a linear model, we report limits of detection as low as 8.1 parts per million (ppm) for valeric acid within mixtures.

引用

页数：5

共 50 条

[41] Enhancement of Directivity of an OAM Antenna by Using Fabry-Perot Cavity
Wei, W. L.
Mahdjoubi, K.
Brousseau, C.
Emile, O.
Sharaiha, A.
2016 10TH EUROPEAN CONFERENCE ON ANTENNAS AND PROPAGATION (EUCAP), 2016,
[42] Highly sensitive Fabry-Perot sensor for the detection of sodium copper chlorophyllin
Xu, Changping
Zhang, Yangyuan
Bai, Yangbo
Miao, Yinping
OPTICS AND LASER TECHNOLOGY, 2025, 180
[43] Scanning Fabry-Perot filters for terahertz spectroscopy based on silicon dielectric mirrors
Cleary, Justin W.
Fredricksen, Chris J.
Muravjov, Amdrei V.
Enz, Jasen
Dolguikh, Maxim V.
Du Bosq, Todd W.
Peale, Robert E.
TERAHERTZ AND GIGAHERTZ ELECTRONICS AND PHOTONICS VI, 2007, 6472
[44] Detection of acetone using chemo-mechanical polymer incorporated fiber Fabry-Perot interferometer
Kaushal, Karvan
Das, Bhargab
JOURNAL OF OPTICS-INDIA, 2024,
[45] A novel design of Fabry-Perot antenna using metamaterial superstrate for gain and bandwidth enhancement
Razi, Zahra Mousavi
Rezaei, Pejman
Valizade, Arash
AEU-INTERNATIONAL JOURNAL OF ELECTRONICS AND COMMUNICATIONS, 2015, 69 (10) : 1525 - 1532
[46] Hetero-core structured Fabry-Perot fiber sensor for liquid refractive index and Hydrogen gas detection
Hashimoto, Mizuki
Hosoki, Ai
Nishiyama, Michiko
Watanabe, Kazuhiro
2015 9TH INTERNATIONAL CONFERENCE ON SENSING TECHNOLOGY (ICST), 2015, : 325 - 328
[47] Broadband and multi-mode Fabry-Perot cavity antenna with gain enhancement
Wu, Ting
Chen, Juan
Wu, Peng-Fei
AEU-INTERNATIONAL JOURNAL OF ELECTRONICS AND COMMUNICATIONS, 2020, 127
[48] Increasing the sensitivity of Fabry-Perot ultrasound sensors by multi-channel averaging
Guggenheim, James A.
Nam Trung Huynh
Zhang, Edward Z.
Beard, Paul C.
2023 IEEE PHOTONICS CONFERENCE, IPC, 2023,
[49] Optical fiber Fabry-Perot pressure sensor using corrugated diaphragm
Chen L.
Zhu J.
Li Z.
Wang M.
Guangxue Xuebao/Acta Optica Sinica, 2016, 36 (03):
[50] High resolution determination of radii of curvature using Fabry-Perot interferometry
Lawall, John R.
MEASUREMENT SCIENCE AND TECHNOLOGY, 2009, 20 (04)

← 1 2 3 4 5 →