Design and analysis of silicon antiresonant reflecting optical waveguides for evanscent field sensor

被引:48
作者
Prieto, F
Llobera, A
Jiménez, D
Doménguez, C
Calle, A
Lechuga, LM
机构
[1] CSIC, IMM, Natl Ctr Microelect, Madrid, Spain
[2] CSIC, Natl Ctr Microelect, IMB, Bellaterra 08193, Barcelona, Spain
[3] Univ Autonoma Barcelona, Dept Elect Engn, Bellaterra 08193, Barcelona, Spain
关键词
antiresonant reflecting optical waveguide; (ARROW) theoretical design; evanescent wave sensors; Mach-Zehnder interferometer; silicon technology;
D O I
10.1109/50.850742
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Silicon based antiresonant reflecting optical waveguides (ARROW's) have been designed in order to obtain a high sensitive optical transducer for sensing applications, The designed sensor has an integrated Mach-Zehnder interferometer configuration, The optical waveguides that form its structure have to verify two conditions: monomode behavior and high surface sensitivity. In this paper, we present a theoretical modeling of the propagation characteristics and surface sensitivity of the ARROW structure.
引用
收藏
页码:966 / 972
页数:7
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