Auto-triangulation and auto-trilateration - Part 2: Three-dimensional experimental verification

被引:12
作者
Lee, MC [1 ]
Ferreire, PM [1 ]
机构
[1] Univ Illinois, Dept Mech & Ind Engn, Urbana, IL 61801 USA
来源
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY | 2002年 / 26卷 / 03期
关键词
self-calibration; auto-calibration; machine tool metrology; trilateration;
D O I
10.1016/S0141-6359(02)00109-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In the companion paper, [Prec Eng 2002, in press] we introduced an approach to extending the idea of self-calibration to triangulation and trilateration. The advantages of this approach over the conventional approach to self-calibration (that uses a calibration artifact) include the facts that it only requires a linear transducer instead of an artifact it extends naturally to higher dimensional self-calibration problems (three-dimensional self-calibration), and it is capable of producing any calibration map instead of a predetermined discrete calibration map. In the aforementioned companion paper, our discussion concentrated on describing the underlying concepts and the process for generating a self-calibration map. It also concentrated on proving that the approach could, in the, Limit, calibrate any point in the feasible calibration workspace (or any length in the measuring range of the linear, transducer). All this was discussed in the context of a two-dimensional calibration problem. This paper extends the mathematical formulation to three-dimensional self-calibration or auto-trilateration. First, the basic formulation to produce the auto-calibration equations for trilateration is developed. Next, a three-dimensional verification experiment is described and its results discussed. Auto-trilateration allows for cheap and efficient calibration of three-axis machining centers and can promote regular and cost-effective calibration in the NC machining industry. (C) 2002 Elsevier Science Inc. All rights reserved.
引用
收藏
页码:250 / 262
页数:13
相关论文
共 8 条
[1]  
LEE MC, 2002, FUNDAMENTALS PREC EN
[2]  
LEE MC, 2000, THESIS U ILLINOIS UR
[3]  
Raugh M. R., 1986, Auto calibration method suitable for use in electron beam lithography, Patent No. [U. S. Patent 4 583 298, 4583298]
[4]   ABSOLUTE 2-DIMENSIONAL SUB-MICRON METROLOGY FOR ELECTRON-BEAM LITHOGRAPHY [J].
RAUGH, MR .
PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 1985, 7 (01) :3-13
[5]  
TAJBAKHSH H, 1997, THESIS U ILLINOIS UR
[6]  
TAKAC M, 1993, SPIE PHOTOMASK TECHN, V2087, P80
[7]   An exact algorithm for self-calibration of two-dimensional precision metrology stages [J].
Ye, J ;
Takac, M ;
Berglund, CN ;
Owen, G ;
Pease, RF .
PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 1997, 20 (01) :16-32
[8]   THE LASER BALL BAR - A NEW INSTRUMENT FOR MACHINE-TOOL METROLOGY [J].
ZIEGERT, JC ;
MIZE, CD .
PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 1994, 16 (04) :259-267