TiAlN hard coating;
magnetron sputtering;
oxidation;
growth defect;
focused ion beam (FIB);
scanning electron microscopy (SEM);
scanning transmission electron microscopy (STEM);
D O I:
10.3390/coatings11020123
中图分类号:
T [工业技术];
学科分类号:
08 ;
摘要:
This paper reports the results of an investigation of the oxidation of a sputter-deposited TiAlN hard coating in air at temperatures of 800 and 850 degrees C for times ranging from 15 min to 2 h. The study is focused on the role of growth defects in the oxidation process. The mechanism of oxidation at the site of the defect was studied on cross-sections made by the consecutive sectioning of oxidized coatings with the FIB technique. We found that in the early stage of oxidation, the locally intense oxidation always starts at such defects. Although the growth defects reduce the oxidation resistance of the coating locally, we believe that they do not have a decisive influence on the global oxidation resistance of the coating. There are several reasons for this. The first is that the surface area covered by growth defects is relatively low (less than 1%). Secondly, the coating is permeable only at those defects that extend through the entire coating thickness. Thirdly, the permeability at the rim of some defects strongly depends on the density of pores at the rim of defects and how open they are. The size and density of such pores depend on the shape and size of topographical irregularities on the substrate surface (e.g., seeds, pits), which are responsible for the formation of growth defects. We also found that oxidation of the TiAlN coating is accelerated by oxygen and titanium diffusion through the pores formed by crystal grain growth in the outer alumina overlayer. Such pores are formed due to the compressive stresses in the Ti-rich oxide layer, which are caused by the large difference in molar volumes between the oxide and nitride phases.
机构:
Ming Chi Univ Technol, Dept Mat Engn, New Taipei, Taiwan
Ming Chi Univ Technol, Ctr Thin Film Technol & Applicat, New Taipei, TaiwanMing Chi Univ Technol, Dept Mat Engn, New Taipei, Taiwan
Chang, Li-Chun
Chen, Yung-I
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机构:
Natl Taiwan Ocean Univ, Inst Mat Engn, Keelung, TaiwanMing Chi Univ Technol, Dept Mat Engn, New Taipei, Taiwan
Chen, Yung-I
Kao, Hsuan-Ling
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机构:
Chang Gung Univ, Dept Elect Engn, Tao Yuan, TaiwanMing Chi Univ Technol, Dept Mat Engn, New Taipei, Taiwan
机构:
STANISLAW STASZIC UNIV MIN & MET,DEPT SOLID STATE CHEM,PL-30059 KRAKOW,POLANDSTANISLAW STASZIC UNIV MIN & MET,DEPT SOLID STATE CHEM,PL-30059 KRAKOW,POLAND
Mitsui, H
Habazaki, H
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STANISLAW STASZIC UNIV MIN & MET,DEPT SOLID STATE CHEM,PL-30059 KRAKOW,POLANDSTANISLAW STASZIC UNIV MIN & MET,DEPT SOLID STATE CHEM,PL-30059 KRAKOW,POLAND
Habazaki, H
Hashimoto, K
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STANISLAW STASZIC UNIV MIN & MET,DEPT SOLID STATE CHEM,PL-30059 KRAKOW,POLANDSTANISLAW STASZIC UNIV MIN & MET,DEPT SOLID STATE CHEM,PL-30059 KRAKOW,POLAND
Hashimoto, K
Mrowec, S
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STANISLAW STASZIC UNIV MIN & MET,DEPT SOLID STATE CHEM,PL-30059 KRAKOW,POLANDSTANISLAW STASZIC UNIV MIN & MET,DEPT SOLID STATE CHEM,PL-30059 KRAKOW,POLAND
机构:
Univ Illinois, Dept Mat Sci & Engn, Urbana, IL 61801 USA
Univ Illinois, Frederick Seitz Mat Res Lab, Urbana, IL 61801 USAUniv Illinois, Dept Mat Sci & Engn, Urbana, IL 61801 USA
Shetty, Pralav P.
Emigh, Megan G.
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Univ Illinois, Dept Mat Sci & Engn, Urbana, IL 61801 USA
Univ Illinois, Frederick Seitz Mat Res Lab, Urbana, IL 61801 USAUniv Illinois, Dept Mat Sci & Engn, Urbana, IL 61801 USA
Emigh, Megan G.
Krogstad, Jessica A.
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机构:
Univ Illinois, Dept Mat Sci & Engn, Urbana, IL 61801 USA
Univ Illinois, Frederick Seitz Mat Res Lab, Urbana, IL 61801 USAUniv Illinois, Dept Mat Sci & Engn, Urbana, IL 61801 USA
机构:
Bhabha Atom Res Ctr, Solid State Phys Div, Mumbai 400085, Maharashtra, IndiaBhabha Atom Res Ctr, Solid State Phys Div, Mumbai 400085, Maharashtra, India
Jana, Swapan
Debnath, Anil Krishna
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Bhabha Atom Res Ctr, Tech Phys Div, Mumbai, Maharashtra, India
Homi Bhabha Natl Inst, Mumbai, Maharashtra, IndiaBhabha Atom Res Ctr, Solid State Phys Div, Mumbai 400085, Maharashtra, India
Debnath, Anil Krishna
Putta, Veerender
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Bhabha Atom Res Ctr, Tech Phys Div, Mumbai, Maharashtra, IndiaBhabha Atom Res Ctr, Solid State Phys Div, Mumbai 400085, Maharashtra, India
Putta, Veerender
Bahadur, Jitendra
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Bhabha Atom Res Ctr, Solid State Phys Div, Mumbai 400085, Maharashtra, India
Homi Bhabha Natl Inst, Mumbai, Maharashtra, IndiaBhabha Atom Res Ctr, Solid State Phys Div, Mumbai 400085, Maharashtra, India
Bahadur, Jitendra
Chauhan, Anil Kumar
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Bhabha Atom Res Ctr, Tech Phys Div, Mumbai, Maharashtra, India
Homi Bhabha Natl Inst, Mumbai, Maharashtra, IndiaBhabha Atom Res Ctr, Solid State Phys Div, Mumbai 400085, Maharashtra, India
Chauhan, Anil Kumar
Bhattacharya, Debarati
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Bhabha Atom Res Ctr, Solid State Phys Div, Mumbai 400085, Maharashtra, India
Homi Bhabha Natl Inst, Mumbai, Maharashtra, IndiaBhabha Atom Res Ctr, Solid State Phys Div, Mumbai 400085, Maharashtra, India
机构:
S China Univ Technol, Sch Chem & Chem Engn, Guangzhou 510640, Guangdong, Peoples R ChinaS China Univ Technol, Sch Chem & Chem Engn, Guangzhou 510640, Guangdong, Peoples R China
Xing, Jun-heng
Xia, Zheng-bin
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S China Univ Technol, Sch Chem & Chem Engn, Guangzhou 510640, Guangdong, Peoples R ChinaS China Univ Technol, Sch Chem & Chem Engn, Guangzhou 510640, Guangdong, Peoples R China
Xia, Zheng-bin
Li, Hui
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S China Univ Technol, Sch Chem & Chem Engn, Guangzhou 510640, Guangdong, Peoples R ChinaS China Univ Technol, Sch Chem & Chem Engn, Guangzhou 510640, Guangdong, Peoples R China
Li, Hui
Wang, Ying-ying
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S China Univ Technol, Sch Chem & Chem Engn, Guangzhou 510640, Guangdong, Peoples R ChinaS China Univ Technol, Sch Chem & Chem Engn, Guangzhou 510640, Guangdong, Peoples R China
Wang, Ying-ying
Zhong, Li
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S China Univ Technol, Sch Chem & Chem Engn, Guangzhou 510640, Guangdong, Peoples R ChinaS China Univ Technol, Sch Chem & Chem Engn, Guangzhou 510640, Guangdong, Peoples R China
机构:
Cent S Univ, State Key Lab Powder Met, Changsha 410083, Hunan, Peoples R ChinaCent S Univ, State Key Lab Powder Met, Changsha 410083, Hunan, Peoples R China
Pi, Jingwu
Kong, Yi
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Cent S Univ, State Key Lab Powder Met, Changsha 410083, Hunan, Peoples R ChinaCent S Univ, State Key Lab Powder Met, Changsha 410083, Hunan, Peoples R China
Kong, Yi
Chen, Li
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Cent S Univ, State Key Lab Powder Met, Changsha 410083, Hunan, Peoples R China
Zhuzhou Cemented Carbide Cutting Tools Co Ltd, Zhuzhou 412007, Hunan, Peoples R ChinaCent S Univ, State Key Lab Powder Met, Changsha 410083, Hunan, Peoples R China
Chen, Li
Du, Yong
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Cent S Univ, State Key Lab Powder Met, Changsha 410083, Hunan, Peoples R ChinaCent S Univ, State Key Lab Powder Met, Changsha 410083, Hunan, Peoples R China