Influence of Growth Defects on the Oxidation Resistance of Sputter-Deposited TiAlN Hard Coatings

被引:11
|
作者
Panjan, Peter [1 ]
Drnovsek, Aljaz [1 ]
Drazic, Goran [2 ]
机构
[1] Jozef Stefan Inst, Jamova 39, Ljubljana 1000, Slovenia
[2] Natl Inst Chem, Hajdrihova 19, Ljubljana 1000, Slovenia
关键词
TiAlN hard coating; magnetron sputtering; oxidation; growth defect; focused ion beam (FIB); scanning electron microscopy (SEM); scanning transmission electron microscopy (STEM);
D O I
10.3390/coatings11020123
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This paper reports the results of an investigation of the oxidation of a sputter-deposited TiAlN hard coating in air at temperatures of 800 and 850 degrees C for times ranging from 15 min to 2 h. The study is focused on the role of growth defects in the oxidation process. The mechanism of oxidation at the site of the defect was studied on cross-sections made by the consecutive sectioning of oxidized coatings with the FIB technique. We found that in the early stage of oxidation, the locally intense oxidation always starts at such defects. Although the growth defects reduce the oxidation resistance of the coating locally, we believe that they do not have a decisive influence on the global oxidation resistance of the coating. There are several reasons for this. The first is that the surface area covered by growth defects is relatively low (less than 1%). Secondly, the coating is permeable only at those defects that extend through the entire coating thickness. Thirdly, the permeability at the rim of some defects strongly depends on the density of pores at the rim of defects and how open they are. The size and density of such pores depend on the shape and size of topographical irregularities on the substrate surface (e.g., seeds, pits), which are responsible for the formation of growth defects. We also found that oxidation of the TiAlN coating is accelerated by oxygen and titanium diffusion through the pores formed by crystal grain growth in the outer alumina overlayer. Such pores are formed due to the compressive stresses in the Ti-rich oxide layer, which are caused by the large difference in molar volumes between the oxide and nitride phases.
引用
收藏
页码:1 / 22
页数:22
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