共 5 条
High-Q vertically coupled InP microdisk resonators
被引:43
作者:
Djordjev, K
[1
]
Choi, SJ
[1
]
Choi, SJ
[1
]
Dapkus, PD
[1
]
机构:
[1] Univ So Calif, Dept Elect Engn Electrophys, Los Angeles, CA 90089 USA
关键词:
demultiplexers;
InGaAsP;
integrated optics;
microdisk resonators;
microresonators;
optical switches;
optical waveguide filters;
wavelength-division multiplexing;
D O I:
10.1109/68.986803
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
High-quality factor vertically coupled InP microdisk resonators have been fabricated. Wafer bonding techniques have been used as a main approach to enable this three-dimensional structure. The devices exhibit smooth sidewalls, single mode operation, and high-quality factors in excess of 7000.
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页码:331 / 333
页数:3
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