Quasi-equilibrium crystal shapes and kinetic Wulff plots for gallium nitride grown by hydride vapor phase epitaxy

被引:31
作者
Bryant, Benjamin N. [1 ]
Hirai, Asako [1 ]
Young, Erin C. [1 ]
Nakamura, Shuji [1 ]
Speck, James S. [1 ]
机构
[1] Univ Calif Santa Barbara, Dept Mat, Santa Barbara, CA 93106 USA
基金
美国国家科学基金会;
关键词
QECS; Wulff plot; HVPE; GaN; THERMODYNAMIC ANALYSIS;
D O I
10.1016/j.jcrysgro.2013.01.031
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
In this paper we demonstrate work on developing the kinetic Wulff plots and quasi-equilibrium crystal shapes of GaN by hydride vapor phase epitaxy to understand the stable polar, semipolar, and nonpolar planes that emerge naturally from the GaN crystal. High quality bulk m-plane GaN substrates were masked with circular openings to perform selective area growth studies. Growths were performed by hydride vapor phase epitaxy over a range of temperatures, pressures and carrier gases. The quasi-equilibrium crystal shapes were shown to have clear m-plane {1 (1) over bar 00} facets and a sharp and flat (000 (1) over bar) N-face or c- face. The (0001) Ga-face or c+ face became faceted with {10 (1) over bar1} planes emerging with reduced pressures and temperatures. Based on the stable facets, kinetic Wulff plots were constructed. (C) 2013 ElsevierB.V. All rights reserved.
引用
收藏
页码:14 / 20
页数:7
相关论文
共 16 条
[1]   Scaling relationships for analyzing kinetics in GaN epitaxial lateral overgrowth [J].
Coltrin, ME ;
Mitchell, CC .
JOURNAL OF CRYSTAL GROWTH, 2004, 261 (01) :30-37
[2]   Mass transport and kinetic limitations in MOCVD selective-area growth [J].
Coltrin, ME ;
Mitchell, CC .
JOURNAL OF CRYSTAL GROWTH, 2003, 254 (1-2) :35-45
[3]  
Du D.X., 2005, PHYS REV LETT, V95, P4
[4]   SOME THEOREMS ON THE FREE ENERGIES OF CRYSTAL SURFACES [J].
HERRING, C .
PHYSICAL REVIEW, 1951, 82 (01) :87-93
[5]   Defect-mediated surface morphology of nonpolar m-plane GaN [J].
Hirai, A. ;
Haskell, B. A. ;
McLaurin, M. B. ;
Wu, F. ;
Schmidt, M. C. ;
Kim, K. C. ;
Baker, T. J. ;
DenBaars, S. P. ;
Nakamura, S. ;
Speck, J. S. .
APPLIED PHYSICS LETTERS, 2007, 90 (12)
[6]  
Hirai A., 2009, THESIS UCSB
[7]   Thermodynamic analysis of hydride vapor phase epitaxy of GaN [J].
Koukitu, A ;
Hama, S ;
Taki, T ;
Seki, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (3A) :762-765
[8]   Thermodynamic analysis of group III nitrides grown by metal-organic vapour-phase epitaxy (MOVPE), hydride (or halide) vapour-phase epitaxy (HVPE) and molecular beam epitaxy (MBE) [J].
Koukitu, A ;
Kumagai, Y .
JOURNAL OF PHYSICS-CONDENSED MATTER, 2001, 13 (32) :6907-6934
[9]   Using the kinetic Wulff plot to design and control nonpolar and semipolar GaN heteroepitaxy [J].
Leung, Benjamin ;
Sun, Qian ;
Yerino, Christopher D. ;
Han, Jung ;
Coltrin, Michael E. .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2012, 27 (02)
[10]   Theory of GaN(10(1)over-bar-0) and (11(2)over-bar-0) surfaces [J].
Northrup, JE ;
Neugebauer, J .
PHYSICAL REVIEW B, 1996, 53 (16) :10477-10480