Seed Layer Controlled Deposition of ZnO Films with a Tilted c-axis for Shear Mode Resonators

被引：0

作者：

Rughoobur, G. ^{[1
]}

Garcia-Gancedo, L. ^{[1
]}

Flewitt, A. J. ^{[1
]}

Milne, W. I. ^{[1
]}

DeMiguel-Ramos, M. ^{[2
]}

Clement, M. ^{[2
]}

Mirea, T. ^{[2
]}

Olivares, J. ^{[2
]}

Iborra, E. ^{[2
]}

机构：

[1] Univ Cambridge, Elect Engn Div, 9 JJ Thomson Ave, Cambridge CB3 0FA, England

[2] Univ Politecn Madrid, ETSIT, GMME, CEMDATIC, Madrid, Spain

来源：

2014 EUROPEAN FREQUENCY AND TIME FORUM (EFTF) | 2014年

基金：

欧盟第七框架计划; 英国工程与自然科学研究理事会;

关键词：

seed layer; shear mode resonator; ZnO; tilted c-axis;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We investigate different procedures for achieving ZnO films with the c-axis tilted with respect to the normal for their application in acoustic resonators operating in the shear modes. The approach consists in combining the use of textured surfaces of different nature with off-axis sputtering, which promotes the growth of ZnO with inclined microcrystals. The rough surfaces investigated are porous-SiO2 and AlN and ZnO seed layers films specifically prepared to exhibit textured surfaces. The suitability of these films for the intended applications is tested by analyzing the frequency response of ZnO-based solidly mounted resonators. Electromechanical coupling factors for the shear modes up to 3.3% are achieved.

引用

页码：297 / 300

页数：4

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