Synthesis of SiC-Si3N4 composite nanoparticles by laser-induced chemical deposition

SiC-Si3N4 composite nanoparticles were synthesized by laser-induced chemical vapor deposition. The crystalline structure, morphology and dangling bonds were investigated by X-ray diffraction (XRD), transmission electron microscopy (TEM) and electron spin resonance (ESR). The original SiC-Si3N4 composite nanoparticles have a sharp particle size distribution and the mean particle diameter is 32nm. A SiC-Si3N4 composite nanoparticle is composed of a single crystal or multicrystal with sizes from 5 to 30nm. The nanoparticles have high purity, are approximately spherical in shape and suitable for treatment and sintering. Moreover, the nanoparticles show high thermal stability, and decrease in the dangling bonds, phase deposition and particle growth take place in order during heating.