Determination of Refractive Index and Thickness of Thin-Film from Reflectivity Spectrum Using Genetic Algorithm

被引：4
|
作者：
Patel, Sanjaykumar J. [1 ]
Kheraj, Vipul [1 ]
机构：
[1] SV Natl Inst Technol, Dept Appl Phys, Surat 395007, Gujarat, India
来源：
PROCEEDING OF INTERNATIONAL CONFERENCE ON RECENT TRENDS IN APPLIED PHYSICS & MATERIAL SCIENCE (RAM 2013) | 2013年 / 1536卷
关键词：
Thin-film; Genetic Algorithm; Reflectivity and LabVIEW etc; OPTICAL-CONSTANTS; SPECTROSCOPIC ELLIPSOMETRY; SILICON;
D O I：
10.1063/1.4810324
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The precise determination of refractive index (n) of material and thickness (t) of thin-films are desirable for many applications in the field of optics and optoelectronics. In the proposed work, we have utilized a computational genetic algorithm (GA) to find the refractive index and the thickness from the experimentally measured reflectivity spectra of thin-film. The algorithm was implemented using the LabVIEW as a programming tool. The obtained results show that the prepared algorithm successfully calculates the spectral dependence of refractive index and thickness of thin-films by fitting an experimentally measured reflectivity spectra with the calculated ones.
引用
收藏
页码：509 / 510
页数：2
相关论文
共 50 条
  • [21] Characterization of zinc oxide thin film using atomic force microscopy and optimized X-ray reflectivity by genetic algorithm
    G. Solookinejad
    A. S. H. Rozatian
    M. H. Habibi
    Experimental Techniques, 2014, 38 : 21 - 27
  • [22] The Optimization of Metal Nitride Coupled Plasmon Waveguide Resonance Sensors Using a Genetic Algorithm for Sensing the Thickness and Refractive Index of Diamond-like Carbon Thin Films
    Junrear, Jaturong
    Sakunasinha, Panarit
    Chiangga, Surasak
    PHOTONICS, 2022, 9 (05)
  • [23] Determination of Optical Constant and Thickness for Thin Film by Using Improved FTM
    CHEN Qian1
    2. Department of Transmission Design and Development
    Semiconductor Photonics and Technology, 2006, (03) : 158 - 162
  • [24] Optimization of Specific Film Thickness for a Disc Cam Using Genetic Algorithm
    Kwon, Soon-Man
    Kim, Chang Hyun
    Nam, Hyoungchul
    Shin, Joong-Ho
    TRANSACTIONS OF THE KOREAN SOCIETY OF MECHANICAL ENGINEERS A, 2008, 32 (11) : 924 - 929
  • [25] Research of the determination of thin film optical constants by using the simulated annealing algorithm
    Wang Wenliang
    Rong Xiaohong
    MECHANICAL, MATERIALS AND MANUFACTURING ENGINEERING, PTS 1-3, 2011, 66-68 : 9 - +
  • [26] Simulated Annealing Algorithm and Genetic Algorithm for Optimization Design of Multi layer Optical Thin-Film Coatings
    Zhang Xiaojuan
    Qiao Guanjun
    MATERIALS ENGINEERING FOR ADVANCED TECHNOLOGIES, PTS 1 AND 2, 2011, 480-481 : 1362 - 1367
  • [27] Three-dimensional refractive index and thickness distribution of thin film measurements through dynamic multiwavelength interferometry
    Wu, Kai
    Lee, Cheng-Chung
    OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION VII, 2011, 8082
  • [28] An Improved Method for Determination of Refractive Index of Dielectric Films from Reflectance Spectrum by Using the Generalized Morse Wavelet
    Tiryaki, Erhan
    Kocahan, Ozlem
    Ozder, Serhat
    MEASUREMENT SCIENCE REVIEW, 2021, 21 (02) : 61 - 66
  • [29] Simultaneous determination of thickness and refractive index using Cauchy or Sellmeier formulas by the example of surface plasmon resonance study on ultrathin polysulfone film
    Pogreb, Roman
    Grynyov, Roman
    Ben-Yosef, Oz
    Whyman, Gene
    INTERNATIONAL JOURNAL OF POLYMER ANALYSIS AND CHARACTERIZATION, 2021, 26 (08) : 661 - 667
  • [30] Simultaneous Determination of Refractive Index and Thickness of Submicron Optical Polymer Films from Transmission Spectra
    Bonal, Victor
    Quintana, Jose A.
    Villalvilla, Jose M.
    Munoz-Marmol, Rafael
    Mira-Martinez, Jose C.
    Boj, Pedro G.
    Cruz, Maria E.
    Castro, Yolanda
    Diaz-Garcia, Maria A.
    POLYMERS, 2021, 13 (15)
12345