Dependence of emission characteristics of Spindt-type field emitters on cathode material

被引：23
作者：
Nagao, M
Utsumi, K
Gotoh, Y [1 ]
Tsuji, H
Ishikawa, J
Nakatani, T
Sakashita, T
Betsui, K
机构：
[1] Kyoto Univ, Dept Elect Sci & Engn, Sakyo Ku, Kyoto 6068501, Japan
[2] Fujitsu Labs Ltd, Akashi, Hyogo 6748555, Japan
来源：
APPLIED SURFACE SCIENCE | 1999年 / 146卷 / 1-4期
关键词：
vacuum microelectronics; Spindt-type emitter; field emission; emission stability; noise power;
D O I：
10.1016/S0169-4332(99)00049-5
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
We fabricated Spindt-type field emitters with four kinds of cathode material (Au, Ni, Pt, and Mo) and estimated the emission characteristics. The Pt emitter showed the best emission characteristics with the lowest operating voltage and the most stable emission among the four kinds of emitters. The difference of the operating voltage among the cathode material is attributed to the emitter shape. The reason the Pt emitter showed stable emission is its inert surface. Pt is a promising material for Spindt-type field emitters from the cone shape, melting point, and inert surface. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：182 / 186
页数：5
相关论文
共 10 条
1