Accurate wide-range displacement measurement using tunable diode laser and optical frequency comb generator

被引：46

作者：

Bitou, Y ^{[1
]}

Schibli, TR ^{[1
]}

Minoshima, K ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, AIST, Metrol Inst Japan, Tsukuba, Ibaraki, Japan

来源：

OPTICS EXPRESS | 2006年 / 14卷 / 02期

关键词：

D O I：

10.1364/OPEX.14.000644

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A laser-frequency-based displacement measurement system with sub-nanometer uncertainty using an optical frequency comb generator is developed. In this method, the optical frequency of a tunable laser is locked to the resonance of a Fabry-Perot cavity. One of the two mirrors of this Fabry-Perot cavity is connected to the element whose displacement is to be measured. Wide range optical frequency and displacement measurements were realized by using an optical frequency comb generator, which consists of an electro-optic modulator placed inside of an optical resonator. We demonstrate a displacement measurement of up to 10 mu m with 220 pm uncertainty under the stable condition. (c) 2006 Optical Society of America.

引用

页码：644 / 654

页数：11

共 19 条

[1] Rubidium-stabilized diode laser for high-precision interferometer [J].

Bitou, Y ;

Sasaki, K ;

Inaba, H ;

Hong, FL ;

Onae, A .

OPTICAL ENGINEERING, 2004, 43 (04) :900-903

[2] A laser measurement system for the high-precision calibration of displacement transducers [J].

Brand, U ;

Herrmann, K .

MEASUREMENT SCIENCE AND TECHNOLOGY, 1996, 7 (06) :911-917

[3] Nanometer measurement with a dual Fabry-Perot interferometer [J].

Chen, BY ;

Zhu, RG ;

Wu, ZT ;

Li, DC ;

Guo, SL .

APPLIED OPTICS, 2001, 40 (31) :5632-5637

[4] Refractive index of air: New equations for the visible and near infrared [J].

Ciddor, PE .

APPLIED OPTICS, 1996, 35 (09) :1566-1573

[5] A simple method for the compensation of the nonlinearity in the heterodyne interferometer [J].

Eom, T ;

Choi, T ;

Lee, K ;

Choi, H ;

Lee, S .

MEASUREMENT SCIENCE AND TECHNOLOGY, 2002, 13 (02) :222-225

[6] Real-time, interferometrically measuring atomic force microscope for direct calibration of standards [J].

Gonda, S ;

Doi, T ;

Kurosawa, T ;

Tanimura, Y ;

Hisata, N ;

Yamagishi, T ;

Fujimoto, H ;

Yukawa, H .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1999, 70 (08) :3362-3368

[7] Calibration of displacement sensors up to 300 μm with nanometre accuracy and direct traceability to a primary standard of length [J].

Haitjema, H ;

Schellekens, PHJ ;

Wetzels, SFCL .

METROLOGIA, 2000, 37 (01) :25-33

[8] Real-time displacement measurements with a Fabry-Perot cavity and a diode laser [J].

Howard, L ;

Stone, J ;

Fu, J .

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2001, 25 (04) :321-335

[9] Removing nonlinearity of a homodyne interferometer by adjusting the gains of its quadrature detector systems [J].

Keem, T ;

Gonda, S ;

Misumi, I ;

Huang, QX ;

Kurosawa, T .

APPLIED OPTICS, 2004, 43 (12) :2443-2448

[10] WIDE-SPAN OPTICAL FREQUENCY COMB GENERATOR FOR ACCURATE OPTICAL FREQUENCY DIFFERENCE MEASUREMENT [J].

KOUROGI, M ;

NAKAGAWA, K ;

OHTSU, M .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1993, 29 (10) :2693-2701

← 1 2 →