The control of six degree of freedom magnetically suspended stage

被引：0

作者：

Wang, CH ^{[1
]}

机构：

[1] Univ N Carolina, Ctr Precis Metrol, Charlotte, NC 28223 USA

来源：

PROCEEDINGS OF THE FIFTEENTH ANNUAL MEETING OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 2000年

关键词：

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper describes the controller design for a magnetically suspended stage with six degrees-of-freedom. The stage employs a single platen as the moving part with a large travel volume of 25mm. x 25mm x 0.1mm. We will present the modeling of the platen taking into account motion couplings between the different movements, and a controller design that decouples the six-input six-output control into six separate single-input single-output controls. Results showing 0.3nm stepping performance are given.

引用

页码：300 / 303

页数：4