Deposition and characterization of pure and Cd doped SnO2 thin films by the nebulizer spray pyrolysis (NSP) technique

被引:48
作者
Mariappan, R. [1 ]
Ponnuswamy, V. [1 ]
Suresh, P. [2 ]
Suresh, R. [1 ]
Ragavendar, M. [3 ]
Sankar, C. [1 ]
机构
[1] Sri Ramakrishna Mission Vidyalaya Coll Arts & Sci, Dept Phys, Coimbatore 641020, Tamil Nadu, India
[2] Indian Inst Sci, Mat Res Ctr, Bangalore 560012, Karnataka, India
[3] RVS Coll Engn & Technol, Dept Phys, Coimbatore 641042, Tamil Nadu, India
关键词
Nebulizer spray pyrolysis; XRD; SEM; Electrical; Optical properties; GAS-SENSING CHARACTERISTICS; CHEMICAL-VAPOR-DEPOSITION; TIN OXIDE; OPTICAL-PROPERTIES;
D O I
10.1016/j.mssp.2013.01.006
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Pure and cadmium doped tin oxide thin films were deposited on glass substrates from aqueous solution of cadmium acetate, tin (IV) chloride and sodium hydroxide by the nebulizer spray pyrolysis (NSP) technique. X-ray diffraction reveals that all films have tetragonal crystalline structure with preferential orientation along (200) plane. On application of the Scherrer formula, it is found that the maximum size of grains is 67 nm. Scanning electron microscopy shows that the grains are of rod and spherical in shape. Energy dispersive X-ray analysis reveals the average ratio of the atomic percentage of pure and Cd doped SnO2 films. The electrical resistivity is found to be 10(2) Omega cm at higher temperature (170 degrees C) and 10(3) Omega cm at lower temperature (30 degrees C). Optical band gap energy was determined from transmittance and absorbance data obtained from UV-vis spectra. Optical studies reveal that the band gap energy decreases from 3.90 eV to 3.52 eV due to the addition of Cd as dopant with different concentrations. (C) 2013 Elsevier Ltd. All rights reserved.
引用
收藏
页码:825 / 832
页数:8
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