Batch derivation of piezoresistive coefficient tensor by matrix algebra

被引：5

作者：

Bao, MH ^{[1
]}

Huang, YP ^{[1
]}

机构：

[1] Fudan Univ, Dept Microelect, State Key Labs ASIC & Syst, Shanghai 200433, Peoples R China

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2004年 / 14卷 / 03期

关键词：

D O I：

10.1088/0960-1317/14/3/003

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

To commemorate the important discovery of the piezoresistance effect of germanium and silicon by C S Smith half a century ago, we present a new method of deriving the piezoresistive (PR) coefficient tensor for diamond structure material using matrix algebra. Using this method, all the components of the PR coefficient tensor (of the fourth rank) in an arbitrary Cartesian coordinate system can be obtained in a batch and the relation between the components is clearly shown.

引用

页码：332 / 334

页数：3